Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

Gun Type Ionizer

Ambient temperature 0 to 40C (No freezing) Ambient humidity 35 to 65%RH (No condensation) Material Case: PBT Emitter: Tungsten Weight (Body only) Standard nozzle 200 g Bypass nozzle 250 g Standards/Directive CE (EMC directive, RoHS directive), UKCA Ambient humidity 20 to 80%RH Safety standards IEC 62368-1 *4 An AC cord included with an AC adapter is only for use in Japan.

Bag Filter

NBR FGFS5-60 AL-27S 1 FGFC5-60 11 O-ring FGFL3-40 AL-23S 1 FGFR3-40 FKM FGFL5-60 AL-24S 1 FGFR5-60 FGFS3-40 3 FGFC3-40 AL-20S NBR FGFS5-60 5 FGFC5-60 12 Gasket FGFL3-40 3 FGFR3-40 FKM AL-21S FGFL5-60 5 FGFR5-60 Note 1) Refer to How to Order on page 47 for the part of the model number.

Regulator for 2 MPa ARX 20

Dimensions Dimensions 4-R2.5 12 25 41.5 17 34 24 R16.5 Panel nut Gasket 26 11 1.5 24 44 Max. panel thickness 4.5mm 5.4 1.6 54 Install the gasket underneath the panel and bracket (bonnet side).

Solid State Vacuum Regulator Series ITV2090/2091

or less Current type Input impedance Approx. 6.5k Voltage type VAC OUT Tank Approx. 2.7k Preset input ITV2090 1 to 5VDC (load impedance: 1 k or more) Set pressure (Vacuum) Vacuum pump, Ejector Analog output 4 to 20mA (sink type) (load impedance: 250 or less) Output signal Note 3) (Monitor output) NPN open collector output: Max. 30V, 30mA Switch output PNP open collector output: Max. 30mA

Solid State Vacuum Regulator

or less Current type Input impedance Approx. 6.5k Voltage type VAC OUT Tank Approx. 2.7k Preset input ITV2090 1 to 5VDC (load impedance: 1 k or more) Set pressure (Vacuum) Vacuum pump, Ejector Analog output 4 to 20mA (sink type) (load impedance: 250 or less) Output signal Note 3) (Monitor output) NPN open collector output: Max. 30V, 30mA Switch output PNP open collector output: Max. 30mA

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

ZSE F/ISE

of NPT 23.9) 30 30 20 2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 16-2-34 11

60

/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70 75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11

3

VXS VXS 2) Shut off the power supply. 11. To control the fluid in the tank, connect the piping a little higher than the bottom of the tank. 3) Dismount the product. VXB 2. Low frequency operation Switch valves at least once every 30 days to prevent a malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

PFxx-OMO0007CN

-2No.PF-OMO0007CN 1 1.5 3) 3) 1 1 () -3No.PF-OMO0007CN () () -4No.PF-OMO0007CN () * (100 ) :050 -5No.PF-OMO0007CN * (15 / ) FG 49 N () IN IN OUT OUT () IN () -6No.PF-OMO0007CN *) 6 33 2 () () 10 m DC(-)() () -7No.PF-OMO0007CN * ( ) () CE 050 -8No.PF-OMO0007CN * ON , 10 /23 3 OFF (19 ) * OUT -9No.PF-OMO0007CN (11 ) SI L/min L (11 ) 1/8 1/4 3/8 1/2 -10No.PF-OMO0007CN N

PF-OMN0011_C

.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] A 1-5V 1-5V 4-20mA (Hysteresis) ON OFF 90% () Ka (copy function) () 10 L/min 10 L Sa ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L ON-OFF 1 L/min ,10 11 12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C

ASR

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

Stainless Steel Heat

Operation outside of the prescribed range can cause damage, failure or malfunction, etc. 11 Series IDUS/IDFS Specific Product Precautions 1 Air Preparation Equipment Precautions Refer to pages 12 through 14 for safety instructions and cleaning equipment precautions. Installation Location Power Supply Caution Caution Connect the power supply to the terminal block.

KS/KX

Thread Rotating Torque/Allowable Number of Rotations Applicable tube O.D. 8 10 12 4 6 Rotating torque (Nm) (1) 0.022 0.006 0.012 0.020 0.014 Allowable number of rotations Series KS Series KX (rpm) 500 1500 300 1000 250 1000 500 1200 400 1200 Note1) Value under pressure 0.5MPa Male elbow Component Materials Principal element Series KS Series KX Male connector Body Stud, Holder, Guide Chuck

Cylinder with Lock Series CLS

Non-lube type 125, 140, 160 Spring locking Double acting Cylinder Specifications Type Non-lube type Fluid Air Proof pressure 1.57MPa {16kgf/cm} Maximum operating pressure 0.97MPa {9.9kgf/cm} 0.08MPa {0.82kgf/cm} Minimum operating pressure 50 to 500mm/s Piston speed Ambient and fluid temperature Without auto switch: 0C to 70C With auto switch: 0C to 60C (with no freezing) Cushion Yes to 250

Cylinder with Lock Series CNS

Ball retainer Taper ring Brake shoe Release piston Brake spring Air pressure exhaust Air pressure supply A Locked condition Unlocked condition 3 Cylinder with Lock Double Acting: Single Rod Series CNS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 No. 30 Aluminum alloy

Air Cylinder CLA Series Fine Lock Model

11 100+55!fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

Serial Transmission System Series EX250 Series EX500

DN1 Communication protocol DN1 PR1A AB1-X1 MJ1 DeviceNet PROFIBUS-DP Remote I/O (RIO) CC-Link Gateway (GW) Unit Specifications Model EX500-GAB1-X1 EX500-GDN1 EX500-GPR1A EX500-GMJ1 Applicable PLC/ Communication protocol Rockwell Automation PLC PROFIBUS-DP (EN50170) DeviceNet Release 2.0 CC-Link Ver. 1.10 9.6/19.2/45.45/93.75/ 187.5/500 kbit/sec 1.5/3/6/12 Mbit/sec Communication speed 125/250