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-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

IDX-OM-W094

. 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFA60/70/80/90 Series IDX-OM-W094 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11

PSxx-OMV0008CN

, No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

LJ1H

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet Brake Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

CJ2

5 !

Angle Seat Valve /

Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5. Step 5 3 Angle Seat Valve / Air Operated Type VXB Series For Steam Can be used with air or water Flow Rate Characteristics N.C.

Stainless Steel One-touch Fittings Series KG

L M Nylon Urethane D 4 KGH04-00 32.5 10.4 16 5.6 5.6 3 6 KGH06-00 34.5 12.8 17 13.1 13.1 5 8 KGH08-00 38.5 15.2 18.5 26.1 18.0 7 10 KGH10-00 42.5 18.5 21 41.5 29.5 11 12 KGH12-00 44.5 20.9 22 58.3 46.1 14 Different dia. straight: KGH Part No. L M1 Effective orifice(mm 2) Nylon Urethane Applicable tube O.D.

Series KG Stainless Steel One-touch Fittings

L M Nylon Urethane D 4 KGH04-00 32.5 10.4 16 5.6 5.6 3 6 KGH06-00 34.5 12.8 17 13.1 13.1 5 8 KGH08-00 38.5 15.2 18.5 26.1 18.0 7 10 KGH10-00 42.5 18.5 21 41.5 29.5 11 12 KGH12-00 44.5 20.9 22 58.3 46.1 14 Different dia. straight: KGH Part No. L M1 Effective orifice(mm 2) Nylon Urethane Applicable tube O.D.

5 Port Air Operated Valve

hole M5 x 0.8 [4 (A), 2 (B) port] 9.3 27.8 17.8 20.3 20.3 4A 2B P P P 55.5 4A 2B 4A 2B 4A 2B 4A 2B 4A 2B 34 17 6 10 8.2 (Not used.) 5 2 x 5.5 (For mounting) (Pitch) P=27.5 23.5 1/8 [4 (A), 2 (B) port] (Station 1) (Station n) 1/8 [Pilot port: Lateral (-P)] 61.5 43 25 EB EA EB EA 11 M5 x 0.8 [5 (EA), 3 (EB) port] 18 (Pitch) P=27.5 Dimensions (Common to Type 30 and Type 31) n: Stations 20 11

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

OMR0032

NP (5) The "BUSY" output turns ON. OUT0 (4)(6)(9)(11) (INP) Output (6)When the traveling is completed, "OUT0" (INP) output turns ON. (5)(7)(10)(12) BUSY (7) The BUSY output turns OFF. Traveling to target position 1 is completed. (8) Enter pulse input signals.

Digital Flow Switch

Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

EXxx-OMS0026CN

Enable Val165000 5 ON/OFF ON/OFF 10 4 Disable ON/OFF ON/OFF 0 11 83 1( 2Hold/Clear Via software 3PLC 4 5x1000 -48No.EX-OMS0026CN No.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

CE

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment

CE

5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Digital Flow Switches Series PF2A

output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.