2/3 Port Valve

80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH15S Max. vacuum pressure: 88 kPa Exhaust Characteristics Flow Characteristics ZH15L Max. vacuum pressure: 53 kPa Exhaust Characteristics Flow Characteristics Vacuum pressure Vacuum pressure Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Air consumption Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa

ZMA

53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics

MGP

MGG 42 29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-12(S)A 12 18.5 30.8 43.7 (43.6) 35.1 17 54 (53

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FSG1-02-09 (S) 5/16 13.2 37.1 23.5 59.9 14.2 50 AS331FSG1-02-11 (S) 3/8 15.9 17.4 23 41.2 26.1 62.5 15.6 53

Speed Controller with One-touch Fitting

42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 31 (32) AS321F-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS321F-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 32 (33) AS421F-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 54 (53

7

CKP1 series (mm) Bore size (mm) CKP1 Shortened dimensions Current model 40 50 63 7 2 2 58 56 56 65 58 58 CKG1 series (mm) Bore size (mm) CKG1 Shortened dimensions Current model 40 50 63 2 2 2 53 56 56 55 58 58 Total tube length reduced Total tube length reduced Mounting dimension Mounting dimension With air cushion Unclamped side (Head end)Standard Air cushion on both endsMade to Order (-

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

PVT317-53-1A 1 pc.

7

D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal Aluminum body type Stainless steel body T U T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U U V 22 27 55.5 (61) 27 42 (47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53

Vacuum Unit

) Individual exhaust port6 10.4 Common supply (PV) port Metric size: 2 x 8 Inch size: 2 x 5/16" Pilot pressure exhaust port M3 1 82.9 (Ejector system) 87.9 (Vacuum pump system) Vacuum break flow adjusting needle Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16) 26.4 54.8 2 x Common supply (PD) port4 2.6 PS and PD port dimensions1, 4 For high-noise reduction silencer exhaust 62 53

Table of Contents

AT Option: Reference Figure of Assembly ID Piping example of ball valve piping set AMG (45) (41) AFF (54) (100) AM Misc. 14-20-53 1 Related Products: Pressure Differential Gauge GD40-2-01 Model/Specifications The pressure differential at the inlet and the outlet of compressed air equipment can be viewed at a glance on the pressure differential gauge.

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension

CC

Q G Rc 1/8 Pilot air port port (Stop valve side) Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

C85

G1 8 8 to 25 HR N1 N1 Rail mounting type (A) Band mounting type (B) or non-magnet S + Stroke ZZ + 2 x Stroke Wh KK With rod boot C e K 9 9 I f AM h (mm) ND h8 BE KK EE N1 G1 KW NA D F KV HR K ZZ Bore C AM WA SW S WB H WH 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 19 6 28 16 7 7 11.5 48{54} 104{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 4.5 19 6 10.5 28 16 7 48(53

CQS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional Weight (g) Bore size (mm) 12 25 16 20 1.5 12 3 6 Male thread Nut Rod end male thread 1 8 2 4 Rubber bumper (No need to add for long stroke) 0 3 1 2 55(53) 181(172) 65(61) 159(153) Foot style (Including mounting bolt) 58(56) 180(171) 70(66)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

end lock Head end lock O P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53

MGQ

77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL Bearing type 10 21 27 34 38 20 18 22 28 30 51 55 70 71 25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412

RLQ

32 221 351 326 373 263 63 22 53 32 288 523 498 518 263 Bore size (mm) Magnet [Stainless steel mounting screw kit] Use the following stainless steel mounting screw kit (including nuts) as required by the operating environment.