VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

180

-wire(NPN) IC circuit Diagnosis (2-color indicator) 5 V, 12 V Relay, PLC Grommet Yes 24 V 3-wire(PNP) 12 V 2-wire M9NAV 3-wire(NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV M9PA 3-wire(PNP) M9BAV M9BA 12 V 2-wire Auto switches marked with a symbol are produced upon receipt of order.

SL5200

(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

PD3 Circuit without release valve (Usage example of vacuum connection) V V PD2 PD2 Supply valve EXH. P Pressure sensor Do not loosen this nut. Male thread Adapter connection bracket PD1 PD3 P Adapter plate V PD2 Circuit with release valve (Usage example of pressure sensor) Release valve Restrictor 12.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

HRX-OM-W060

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

I

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

IDX-OM-W053

GFCI EDV 14 3 15 V 15 V V 14-2 15-1 1. 1 2 2. 3.

Suction Filter with Case FH99 Series

FH99-FL006-N V FH99-FL004-N V FH990-04 FH99-FL006-N V FH99-FL005-N V FH990-06 FH99-FL009-N V FH99-FL007-N V FH990-08 FH99-FL009-N V FH99-FL008-N V FH990-10 One set each of companion flange, seal, hexagon socket head cap screws FH99-FL011-N V FH99-FL010-N V w Operation The hydraulic fluid used becomes high viscosity when the temperature is low during the winter, etc., and the differential

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

70pvvna

AC (50/60 Hz) 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15% to +10% of rated voltage Class B or equivalent (130C) JIS Symbol PA DC Valve type Style N.C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

HRX-OM-X071

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR-TK001 HRR050-A/W-20/40-UY Nut (M8) Bolt (M8) Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

ZSE30/ISE30

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Model Note Accessory/Option FH34 0 1 CB-48H Petroleum, Water-glycol, Emulsion to CB-48H-V Phosphoric ester FH44 0 1 Differential pressure indicator CB-52H Petroleum, Water-glycol, Emulsion FH342 CB-52H-V Phosphoric ester FH54 0 1 CB-64H Petroleum, Water-glycol, Emulsion to CB-64H-V Phosphoric ester FH64 0 1 FH34 0 1 CB-49H Petroleum, Water-glycol, Emulsion to CB-49H-V Phosphoric ester FH44

I/O Configurator (NFC version)

No.EX-OMV0017-B

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.