asilltr ^-'-t" +'' l' tv."' 2',Sr " ,:; . a . ' li'J.Sh.' A--T.Tr/ir.{ 8r " 4 ' l e A . a ' A . , .
^-'-t" +'' l' tv."' 2',Sr " ,:; . a . ' li'J.Sh.' A--T.Tr/ir.{ 8r " 4 ' l e A . a ' A . , .
Cover Rod cover Unit holding tie-rod A (2 depth 1 mm hole is on the side of tie-rod for attaching unit A.)
Cover Rod cover Unit holding tie-rod A (2 depth 1 mm hole is on the side of tie-rod for attaching unit A.)
IITV00 02 n IITV00-03 .1 set (Manifold part number) ITV0030-3MS ... 2 sets [Electro-pneumatic regulator part number (1, 2 stations)] ITV0030-3ML ... 1 set [Electro-pneumatic regulator part number (3 stations)] Option Stations If a DIN rail longer than the specified stations is required, specify the applicable stations in two digits.
Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction
Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With
proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional
IR30-OM00016 PRODUCT NAME Regulator MODEL / Series / Product Number IR320(0, 1, 2)-A IR321(0, 1, 2)-A IR322(0, 1, 2)-A Contents Safety Instructions 2 to 6 2. Specifications 7 1. Application 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8.
VHS40-06-D 3/4 1/2 34.0 0.22 7.6 16.1 0.41 4.4 VHS50-D 3/4 1/2 45.0 0.26 10.6 23.0 0.49 6.4 1 53.3 0.36 13.5 22.8 0.49 6.3 -7- 4How to Order VHS D 30 03 Symbol Description Body size 20 30 40 50 Handle operation Nil Single action W Double action Thread type Nil Rc *2) N NPT F G 01 1/8 02 1/4 03 3/8 Port size 04 1/2 06 3/4 10 1 a Mounting Nil Without mounting option B With bracket Option
HOW TO ORDER AR 30 03 BG B K 1 4 5 6 3 2 1 1 1 1 Symbol Description Body size 20 25 30 40 50 60 Reverse flow function K With reverse flow function 2 2 2 2 Nil Rc N NPT F G Thread type 3 3 3 3 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 4 4 4 4 Port size Nil Without mounting option B With bracket H With set nut for panel mounting a Mounting Option Nil Without pressure gauge E Square embedding
Avoid using a switch in a magnetic environment. It may cause a malfunction. 2. Use a screwdriver of a size suitable for the groove of the adjustment screw. 2. Do not use in such an environment, where water or oil is splashed.
Tube attachment/detachment for Onetouch fittings 1) Attaching a tube 1. Take a tube having no flaws on its periphery and cut it off at a right angle. When cutting the tube, use tube cutters TK-1, 2 or 3. Do not use pliers, nippers or scissors, etc. If cutting is done with tools other than tube cutters, the tube may be cut diagonally or become flattened, etc.
SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1
VBA Cylinder Mist separator Air supply A, B, P port size Size of 5 port electro-pneumatic proportional valve 04R A/B port Rc 1/2 (Right side), P port Rc 1/2 (Left side) VE Additional stations of solenoid valves Circuit (Basic unit: DXT334-X7 ) 1 2 VY1 VER2000-A VER4000-A 1 2 Nil 0 station G 8 8 stations PPA Ordering example DXT334-X711-04R-04U 1 pc.
with a warning tag. 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Body size 2 3 4 5 1/8 3/8 1/2 1 SMC Interface part is required if attached to a modular FRL.
Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:
Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction
SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1
-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm 20 8-1 A() 8-2 2 15 0.3MPa 30 21 M4x10 LOCK FREE 8-3 () 2 15 0.3MPa 30 [LOCK] 22 8-4 MPa () () mm 40 50 63 80 100 N 882 1370 2160 3430 5390 )15% 23 8-5 (kgf) (kgf) (mm/s) (mm/s) 24