Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

AME

B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

Speed Controller with One-touch Fittings Series AS In-line Type 1

(N specifications) Maximum operating pressure 1 MPa max.

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

AMF

AMF650 AMF850 Symbol BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer With cap bolt, AMF Refer to ''Precautions" on p.4.6-33. 4.6-27 Odor Removal Filter Series AMF AMF150 to AMF850 How to Order AMF 250 03 R B Option R IN, OUT reversal Body size Accessories (Optional) 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01

AMG

Drain guide 1/4B female thread R IN-OUT reverse direction 1/8 1/4 3/8 1/2 3/4 1 150 250 350 450 550 650 850 11/2 Removed rate of water % = HA Removed water (Water droplet) g x 100 Accessories (Options) Inflowed water (Water droplet) g Symbol Description No accessories Bracket AT Various equipment for drain discharge B IDl Thread N.C. auto drain C Rc (PT) N.O. auto drain D AMG F G(PF) N

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Soft Start-up Valve AV2000/3000/4000/5000

valve AV2000 AV3000 AV4000 Except AC4000-06 AV5000 F.R.L. combination Soft Start-up Valve AV2000/3000/4000/5000 How to Order AV 00 1 G 20 02 F C Soft start-up valve Manual override Nil: Non-locking push type (flush type) B: Locking type (tool required) C: Locking type (lever type) Body size 1/4 3/8 1/2 3/4, 1 20 30 40 50 Thread type Indicator light/Surge voltage suppressor Rc G NPT Nil F N

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

AC Servo Motor Driver (SSCNET /H Type)

Movement amount per rotation (AL) = PB1/n = Movement amount per rotation (AL) Unit magnification (AM) 7.3 Stroke limit Wiring for stroke limit. If no wiring is used, set the parameter for signal logic selection. Wiring of hardware stroke limit. If the hardware stroke limit function is used, QD77MS/ driver upper limit/ lower stroke limit wiring should be configured as shown below.

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: R (Right to Left)