SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

MHL2

Fingers synchronized by a rack and pinion mechanism Model/Stroke Max operating frequency (c.p.m) Opening/closing stroke (L2L1)(mm) Weight (g) Width at closing (mm) (L1) Width at opening (mm) (L2) Bore size (mm) Model Built-in dust proofing mechanism 60 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 56 78 96 68 110 130 82 142 162 100 182 200 150 198 242 188 246 286 76 118 156

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420 mm/s in Graph (3).

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420 mm/s in Graph (3).

REC

With this actuation, piston speed accelerates (or maintains the same speed). 10-2-100 14 Sine Cylinder Series REC Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-C7/C80 D-G5NTL 8.5 12 24.5 16 HS HS Auto switch A 26 B A 33 B RE A B D-B5/B64/B59W D-H7C Auto switch Auto switch REC 8.5 12 CX 24.5 16 CY HS HS A 38.2 B A 33 B 6.5 MQQ M Courtesy of Steven

MGP

MGP-A 25 16 25 16 50 2025 50 50 20 1 2 21 22 NBR 23 24 25 63100 26 NBR 27 NBR 28 29 A NBR 30 B NBR 31 C NBR 1625 32100 1663 80100 5 1625 32100 7 8 9 10 11 12 13 16 20100 15 16 17 18 19 3 16 1650 4 6 / (mm) (mm) 16 MGP16-A-PS 50 MGP50-A-PS 20 MGP20-A-PS 63 MGP63-A-PS 25 MGP25-A-PS 80 MGP80-A-PS 32 MGP32-A-PS 100 MGP100-A-PS 40 MGP40-A-PS

CNG

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

ML2B

[Horizontal and lateral mounting] A B SOL.3 W RE A B A magnetic field of 14.5 mT is equivalent to a position that has about 18 cm radius from a welded part using about 15,000 amperes of welding amperage. When using it in a stronger magnetic field, cover the sensor with magnetic and shield it.

ML2B

MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223

Transfer

MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

CQS

C(D)QSB D(M) Bore size Stroke SMC Clean Series The rod portion of the actuator has a double seal construction, and a relief port is provided to discharge the exhaust air directly outside of the clean room. Thus, it can be used in a Class 100 clean room.

MHL2

A B C D E F G H 54 96 116 Model MHL2-20D MHL2-20D1 MHL2-20D2 58 100 120 71 113 133 38 80 100 82 142 162 122 222 262 160 260 300 32 68 88 12-4-10 11 Parallel Style Wide Opening Air Gripper Series MHL2 Dimensions MHL2-25D MHZ Closed J MHF 2-M8 x 1.25 thread depth 7 (Mounting thread) A cross view (Fingers closed) MHL MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

MXH

100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm D1 10 10 -X 0.1 1 Weight m (kg) Weight m (kg) Weight m (kg) 20 16 10 6 201 20 20 16 Data 0.01 0.1 16 10 10 6 6 0.001 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (12) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (6) Load

2/3 Port Valve

flow of 100 l/min.

CRQ2

The rotation angle can be adjusted between 90 to 190. n o ti r a a n t o g Rotation starting point 10 10 e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at a n t o g Rotation starting point End of rotation A A R e A Lmax Lmax Size 20 30 40 Lmax 24 27 31.5 Size 10 15 20 30 40 Size 20 30 40 Rotation starting point 15 18 24 27 31.5 24 27 31.5 10 End of rotation

CY1F

M1 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max. at 420mm/s in Graph 3.