Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

CEx-OMQ0010

200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100 1.5MPa

JXCx-OMT0034CN

CN1IF (CONT) 19 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SW OFF RWw(n+1)b0 ON(1) (LEC) (LEC)(LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.CN2TB/PC () 20 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 1 () 4 0V 5 FG FG (LEC)(0V)

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Refer to the Specific Product Precautions for the replacement period. 1517 A

Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

JXCx-OMT0032CN

CN1IF(CONT) 18 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SWOFF(LEC)(LEC) (LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

XL-OMY0001

100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55

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be) a a a a o a a a a a a a a a a a a a a a a a a a a a o a a a a a a o a a a a a a a a a o a a a a o a a a a a a o a a a a a a a Polyurethane Tirbing TIUB (lnch) TU TU EE4 si.. (..) J @ 1." roll T Length per roll 20nr 33mB"l 100m is3!

4/5 Port Air Operated Valve Series SYJA3000

Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)

Vacuum Unit

B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC(

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

ZP

B C D J K Y A J K B Y C D Misc.

7ND9071en

Select between two values 2-A or 1-A using the + and keys. The value 2-A indicates a double acting actuator and 1-A a single acting actuator. To conclude press the ?

HRX-OM-W038

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-O021

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

•

A12 Symbol, A13 Symbol A14 ::l C. ~ ,DA c Rball 1 \ B ~l , I ~ I H l i Symbot, A16 Symbol,A15 Symbol' A17 Symbol A1S Symbol A 19 .. ~ ~i >If? I ~ A H / ~ M 30' ! " A I H 30' MM .. Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and