25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Compact and Lightweight

Vacuum (V) and exhaust (E) port should not be sealed simultaneously.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

3

moment of inertia [kgm2] Allowable moment of inertia [kgm2] 102 102 MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 50 100 200 104 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 386 Model Selection MK Series Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

Air Cylinder CLA Series Fine Lock Model

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

PFxx-OMO0004CN

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

Rodless Cylinder for Vacuum Series CYV ø15, ø32

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

VQ4000

Light /Surge voltage suppressor Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal Coil voltage 1 2 3 Stations 0 1 U side 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side Function Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC specification.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Electro-Pneumatic Positioner Series IP8000/8100

122 25% 22.5 MPa 1 E ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 75% G1/2 Electric conduit 35 100% 4 x M8 x 1.25 depth12 Female for rear mounting View A 125 2 x M8 x 1.25 depth12 Female for side mounting 194 With optional resin cable clamp Applicable cable O.

Low Profile Guide Type

Determination of load's kinetic energy (E) E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 1548.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 1548.)

VNC

1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 Light/surge voltage suppressor Non-locking push type Non-locking extended type Locking slotted type 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178 209 268 3 Stainless steel High Vacuum Angle/In-line Valve

CXS

Bore sizes 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard strokes (mm) 6 10, 15 20, 25, 32 Applicable auto switches: Refer to pages 40 through 49 for detailed auto switch specifications.

1.63

size (mm) A E Bore size (mm) A E 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less 50 st or less Over 25 st 100 st or less Over 50 st 100 st or less Over 100 st Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st D20 25 32 40 50 63 57.5 53.5 62.5 55.5 37.5 33.5 42.5 35.5 20.5 16.5 21.5 14.5 109.5 109.5 123 123 89.5 89.5 103 103 53.5 61.5 70.5 77.5 94.5 96.5 9