Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

2.0

D L1 L2 LPV21/22-mm-T3(A)-m 3.5 2.2 6.8 LPV21/22-mm-T4(A)-m 4.5 2.8 6.6 LPV21/22-mm-T6(A)-m 6.5 3.5 6 4 LPV Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.

PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Title not found

Precision measuring equipment (3-D measuring machines) Semiconductor manufacturing equipment Semiconductor inspection equipment Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Air (oxygen, nitrogen, etc.)

Multistage Ejector (N)ZL Series

Suction flow rate Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate 250 125 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure

3 Port Solenoid Valve SYJ300/500/700 Series

3 Port Solenoid Valve SYJ300/500/700 Series Low Power Consumption (0.5W) Interchangeable with the NVJ and NVZ Vacuum Applicable Base Mounted/Body Ported Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q

Multistage Ejector Series ZL112/212 1

150 50 50 75 40 40 ZH 100 50 30 30 20 20 50 ZU 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZL Supply pressure (MPa) Supply pressure (MPa) ZY Flow Characteristics Flow Characteristics Supply pressure

Auto Switch Guide

/E76A/E80A D-R731/R732 D-R801/R802 D-R731C/R732C D-R801C/R802C 10-20-22 General Purpose Auto Switch Connector D-H7A1/H7A2/H7B D-G59/G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1

Auto Switch Guide

Connector D-H7A1/H7A2/H7B D-G59/G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 9-15-27 Grommet

Solid State Auto Switches

/M9P/M9B 1575 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B 1576 D-F9G/F9H (Normally closed) 1577 Direct Grommet D-Y59A/Y59B/Y7P 1578 D-Y69A/Y69B /Y7PV General purpose D-Y7G/Y7H (Normally closed) 1579 D-M5N/M5P/M5B 1580 D-H7A1/H7A2/H7B 1581 Grommet D-G59/G5P/K59 1582 D-H7C Band Connector 1583 D-G39/K39 1584 Terminal conduit D-G39A/K39A 1585 D-F79/F7P/J79 1586 Grommet D-F7NV/F7PV/F7BV Rail 1587 D-J79C Connector

Auto Switch Guide

/E76A/E80A D-R731/R732 D-R801/R802 D-R731C/R732C D-R801C/R802C General Purpose Auto Switch Connector D-H7A1/H7A2/H7B D-G59/G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2

Auto Switch Guide

D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 8-30-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit

Auto Switch Guide

D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 8-30-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit

Auto Switch Guide

D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 8-30-22 Grommet 8-30-23 Connector 8-30-24 Band Terminal conduit

Auto Switch Guide

/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C Grommet Connector Band Terminal conduit 7-9-17 Grommet Rail 7-9-18 Connector 7-9-19 Grommet

Brake mechanism added

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G5BA D-G59F Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F D-F5NT D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BA D-Y7W D-A9 D-M9 D-M9W D-M9A D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size (mm) Ht Hs 40 50 63 80 100 Hw Hs Ht Hs Ht Hs Ht Hs

Pin Clamp Cylinder Series CKQ/CLKQ

mounting type Applicable auto switch: D-A79W D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

, D-C8 D-H7, D-H7W, D-H7F, D-H7BAL Auto switch 8.5 Approx.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.