IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Precision Regulator Series IR1000/2000/3000

Flow rate (l /min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) IR2020-02 IR2020-02 IR2020-02 Supply pressure: 1.0 MPa Back pressure: 1.0 MPa 1.0 0.8 0.204 0.9 Set pressure P2 (MPa) Set pressure (MPa) 0.7 Set pressure (MPa) 0.8 0.6 0.202 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200 1400 0 0.2 0.1

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .

Precision Regulator

0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

Digital Flow Switch (Integrated display type)

Load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 -40No.PF-OMO0008-C Specifications Model PF2A7--28--X560 PF2A7--68--X560 PF2A7--29--X560 PF2A7--69--X560 Voltage output (1 to 5 V) Current output (4 to 20 mA) Load impedance Impedance Output impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Analogue output approx. 1 k Accuracy 5%F.S. max

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

Electrostatic Sensor Monitor

Analog output Output current: 4 to 20 mA (Rated measurement range) Max. load impedance: 600 (at 24 VDC) Min. load impedance: 50 Current output Accuracy (to display value 25 oC) 1%F.S.

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

Flow Sensor Series PFMV

Front protective cover D Note Description Part no. Mounting screw (M3 x 8 l) Power supply / Output connector (2 m) ZS-28-A Bracket ZS-28-B With M3 x 5 l (2 pcs.) Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

ITV0000

D side 1 2 3 ...

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

For the D-P3DWAl, refer to the WEB catalog. * The D-A9l/M9lll/P3DWAl auto switches are shipped together, (but not assembled).

energy saving effect

equipped as standard.) sPage 177 sPage 180 With fluid fill port 156 A Thermo-chiller Inverter Type HRSH Series Circulating Fluid Temperature Controller Circuit diagram HRSHl-W-l (Water-cooled refrigeration) HRSHl-A-l (Air-cooled refrigeration) HRS Ventilation DC inverter fan HRS 090 Water regulating valve Air release valve for facility water discharge HRS 100/150 WPR Facility water outlet D

Large blow and

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

Process Pump

D-DN

IDX-OM-W031

On-stream: 2 to 40oC Spaces needed for maintenance Storage: 0 to 50oC (when there is no drain Front : 600 mm water inside of the piping) Rear : 600 mm Top : 600 mm Locations where temperature changes rapidly.

LFE-OMZ0013

Current output Output current: 4 to 20 mA Max. load impedance 600 Hysteresis Variable Input and output Input for copy mode 2 screen display (Main screen: 4 digit, 7-segment, 2 colour; red/green, Sub screen: 6 Display type digit, 11 segment, White) Display updating interval 5 times/sec.

High Vacuum L Type Valve

J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5