Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 15.47400 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 28.06000 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 31.25 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 13.15400 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 22.51500 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 22.52700 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 11.53 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 23.42 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 10.602 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 19.209 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 19.36 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 20.23 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 20.984 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 453, 21.506 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable TIE ROD CYLINDER W/LOCK. Power Lock Cylinder. 12.51600 lb. 453.

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable TIE ROD CYLINDER W/LOCK. Power Lock Cylinder. 10.83400 lb. 453.

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable TIE ROD CYLINDER W/LOCK. Power Lock Cylinder. 12.34200 lb. 453.

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

Air cylinder (Series compatible with secondary batteries)

Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 D-M9-900/M9V-900 D-M9W-900/M9WV-900 90-BA7-040 90-BA7-040 90-BA7-063 90-BA7-080 90-BA7-080 Table 5 Operating Range Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 7.5 8.5 9.5 9.5 10.5 D-M9-900/M9V-900 D-M9W-900/M9WV-900 4.5 5 5.5 5 6 Values which include hysteresis are for guideline purposes only, they are

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5