NAMUR

) NPT Nil F N Voltage Manual override/Classification C F H J P V Y Z 9 1 2 3 4 5 6 7 8 A B 115 VAC, 50/60 Hz 32 VAC, 50/60 Hz 42 VAC, 50/60 Hz 230 VAC, 50/60 Hz 100 VDC 6 VDC 48 VDC 110 VDC Other voltages 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 48 VAC, 50/60 Hz 12 VAC, 50/60 Hz 24 VAC, 50/60 Hz Electrical entry Non-locking

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Plug Series Variations Bore sizes (mm) Seal materials Applicable auto switches 10 16 20 25 32 Series 40 50 63 80 100 Water resistant D-H7BAL CJ5-S NBR FKM Water resistant D-G5BAL CG5-S Related Equipment P. 18 Water Resistant Air Cylinders Speed Controller with One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P.

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

SMC Electronic Switch Series Variations

Between external terminals and case 1000V AC 50/60Hz for 1 min.

Stainless Steel Heat

5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

VY511, VYU5

Controller (VYU5-D) External appearance of exclusive controller RUN1 STOP START SEL. SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Non-contact Gripper

C 2 x M depth ML 11.6 P depth PL Air supply port 4 x M depth ML 4 x M depth ML 16.5 16.5 16.5 D D D XT661-10A-(R, L) XT661-8A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 45 P.C.D. C P.C.D. C 4 x M depth ML 4 x M depth ML 16.5 16.5 D D ZP3 (mm) ZP3E Part no.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-78 5 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d AS A L4 ASP D1 ASN L3 AQ ASV AK M1 ASS D2 T L1 ASR L2 ASF Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1

Flow Control Equipment

D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, CNA2, TIE ROD CYLINDER W/LOCK, 0.00000 lb