NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

. : l L type plug connector (L) , M type plug connector (M) : : With indicator laght and surge voltage suppressof 6.61 7.24 (168) I (184) NVZ3OOO inch (mm) Type 47 Manifold,/ Side Ported Grommet (G) (H) Example pneumatic circuit diagram L type plug connctor (L) f l : with andicator lisht and surge voltage superesso. t.244) (m) 3.31 3.94 (84) (1oo) 5.47 (13s) 7.36 7.99 (187) (2c) (5s) (75

Process Pump Series PA3000/5000/PAX1000 Series PB1000

122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Standard performance conditions Inlet air pressure MPa 0.3 to 0.85 0.3 to 1.0 Inlet air temperature C Note 1) 5 to 55 Ambient temperature C 5 to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75

Digital Flow Switch Series PFA For Air Series PFW For Water

220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Electric Actuators

High rigidity direct acting guide 100 0.03 Ball screw 50 5 100 Features 3 Simplified Selection Flow Chart Series LX Page Standard stroke (mm) and Maximum speed (mm/s) 25 50 75 100 125 150 175 200 Model Standard CE marking Low particulate generation Deflection Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase 216 282 to 200 to 30 5 phase 210 304 294 5 phase 212 to 80 to 100 5 phase 214

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note Description No. 02 C8 C10 SY760-1 Valve Includes 3pcs. of bushing assembly (SY7000-70-1A) U side Ports P, R: With 12 One-touch fitting Includes 3pcs. of bushing assembly (SY7000-70-1A) SY7000-75-1A 2 Supply/Exhaust block assembly Common for U & D sides (bushing assembly: SY7000-70-1A not included) SY7000-56-1A 3 End block assembly SY7000-70-1A 4 Bushing assembly Refer to page 7.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 position SZ360--M5 M5 x 0.8 79 3 position 4 position 75 5 Series SZ3000 Manifold Options SUP blocking disk Blanking block assembly SZ3000-55-1A By installing a SUP blocking disk in the pressure supply passage of a manifold valve, it is possible to supply two or more different high and low pressures to one manifold.

Clean Room Regulator/Fluoro Resin Type Series SRF30

52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 2 position SX340 78 3 position 75 83 2 position SX540 89 3 position 36 Series SX3000/5000 SX3000: Flat Cable Type/Plug-in Stations SS5X3-45GUDC4 C6 Note) L1 to L4 dimensions of SS5X345GUStations Uare the same as SS5X3-45GUStations D-. 2 Stations 3 4 5 6 7 8 9 10 135.5 125 102 16.5 148 148 160.5 150

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5 10 89.5 10 12.5 27 38.5 39 23 74.5 1.5 12 ZPT13F10-0-A10 13 Rc(PT)1/8 15 Width across flats 13 89 90 10.5 13 27.5 75

Please contact us for the latest version.sales@ocaire.com ISE70/75 PRESSURE SWITCH. PRESSURE SWITCH, DIGITAL. INSTRUMENTATION. ISE70/75 1/4 PT VERSION. .90014 lb. DA.

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, D7, ISE70/75 1/4 EURO VERSION, .82060 lb

LEC-OM02704CN

63 6.1.4 64 6.1.5 65 6.1.6 65 3 - 6.1.7 66 6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75

OMR0032

Card Motor Controller Configuration software . 70 14.1 Setup . 70 14.2 Basic Parameter Setup window . 73 14.3 I/O Setup window . 75 14.4 Step Data Setup window . 77 14.5 Monitor/Test window . 80 14.6. Controller ID / communication setting. 82 14.7 Confirmation of the version and initialization . 84 14.8 Closing the software . 84 15.

IDX-OM-W026

5.7 8.4 11.0 m 60Hz 4.3 6.1 9.8 12.4 3/min (ANR)1 MPa 0.7 35 40 32 10 550 MPa 0.151.0 24085% (4) V AC200(50Hz) / AC200,220(60Hz) (2) A 4.3 / 4.7 3.3 / 3.5 4.3 / 4.7 3.3 / 3.5 6.0/6.6 7.2/8.0 (2) W 810 / 940 850 / 1070 810 / 940 850 / 1070 1450/1890 2000/2500 (3) A 10 15 R407C (HFC) g 42010 47010 73010 83010 55010 72010 R1 R11/2 R2 mm 10 1 2 kg 54 62 100 116 kW 22 37 55 75

IDX-OM-W029

) AC200/220V10% 50Hz/60Hz ( 4) AC230V (50Hz) 4.3 6.9 10.7 AC200V (2) A (50/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20 AC200V (3) A (50/60Hz) 10 15 R407C (HFC) AC230V (50Hz) 45010 76010 55010 74510 g AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22 37 55 75

IDX-OM-U010

Note 2: Air flow capacity converted by the compressor intake condition [32C, atmospheric pressure, and 75% relative humidity]. Note 3: Do not use this product with continuous voltage fluctuations. Note 4: These values are reference values under rated conditions and are not guaranteed. Do not use these values for the thermal set values, etc.