Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

Short Stroke Electric Actuator Series LX

(A contact) G GD GB GDB GU GUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/solid state 2 wire/solid state 1 1 1 1 1 1 N.O. (A contact) Proximity switch type N.C. (B contact) None Nil N.C. (B contact) Refer to the table on the right for proximity switch part numbers. N.O. (A contact) N.C.

Brake mechanism added

1/2 (Applicable cable O.D. 6.8 to 9.6) Hs Hs 49 Ht Ht 56 34 36 A B B 33 A D-A3C D-G39C/K39C D-G5/K59 D-G5W/K59W D-G5BA D-G59F/G5NT G 1/2 (Applicable cable O.D. 6.8 to 9.6) B A HW 49 Hs Hs 24.5 B A 33 36 D-F5/J59 D-F5NT D-F5W/J59W D-F5BA/F59F D-A44 G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs Hs 31.5 Ht Ht 56 A 36 B B 30 A D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) B A HW 49.5 Hs 36

VQ5000

H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550 1-G H 194.5(200) 121.3 53 73.2(78.7) Indicator light 213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override

3

CE, RoHS Piping specifications Rc1/2, NPT1/2, G1/2 Rc3/4, NPT3/4, G3/4 Materials of parts in contact with fluid Stainless steel 304, PPS, Aluminum alloy, HNBR, Si, Au, GE4F Environmental Rc thread NPT thread 160 g 240 g Piping specifications G thread 170 g 245 g Lead wire +80 g Bracket +25 g +30 g Weight Note 1) When using the accumulated value hold function, use the operating conditions

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

XLAQ/XLDQ

H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation

HRS100/150

Cap Fluid fill port 112 HRS100/150 Series Optional Accessories q Piping Conversion Fitting This is a fitting to change the port from Rc to G or NPT.

Refrigerated Air Dryer

drain Terminal block F C Ventilation direction Ventilation direction Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) Drain tube (O.D.: 0.4 [10 mm], Length: 39.4 [1.0 m]) J P L K 4 to 0.5 [4 to 13 mm] M N Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Q R Model Port size 31.5 [800] 34.2 [868] IDFB55E 2 18.5 [470] 33.7 [855] 5.0 [128] 17.9 [455] 4.3 [110] 9.8 [250]

HRX-OM-X071

Model number: HRR050-AF/WF-20/40The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Thermo-chiller

(with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Note 1) 400 V type is provided with an earth leakage breaker (-B) as standard.

MXF

H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth 3 +0.025 0 21 4 3H9 depth 3 +0.025 0 (mm) ZZ Z M J H G F N Model MXF8-10 58 49.5 49 21 22 13.5 20 4 MXF8-20 63 54.5 54 26 26 14.5 26 4 MXF8-30 78 69.5 69 41 40 14.5 26 6 8-6-10 11 Low Profile Slide Table Series MXF Dimensions: MXF12 Stroke

Soft Start-up Valve

How to Order Pilot Valve Assembly AV 0 B 1 2 G q w e r t A Symbol Description q Applicable model 2 AV2000-A, AV3000-A 4 AV4000-A, AV5000-A + 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC]*1 4 220 VAC [230 VAC]*1 AC (50/60 Hz) w Rated coil voltage DC 5 24 VDC 6 12 VDC + G Grommet (Lead wire length: 300 mm) D Type D (DIN terminal/With connector) Y Type Y (DIN terminal/With connector)*2 DO Type D (

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147

Compact Manometer Series PPA 1

(Unit 50 g, batteries 50 g) 2 pcs. of type AA dry batteries (manganese R6 or alkaline LR6) are not included.

Compact Manometer Series PPA 1

(Unit 50 g, batteries 50 g) 2 pcs. of type AA dry batteries (manganese R6 or alkaline LR6) are not included.

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Magnet: Built-in, Model: Stainless Steel, 7MPa, Mounting: FA [Front Rectangular Flange (for 3.5, 7MPa)], Bore Size: 50mm, Rod Dimension: Series C Rod Size, Stroke: 200mm, Rod End Nut: w/Rod End Nut, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number

Magnet: Built-in, Model: Stainless Steel, 7MPa, Mounting: FA [Front Rectangular Flange (for 3.5, 7MPa)], Bore Size: 50mm, Rod Dimension: Series C Rod Size, Stroke: 100mm, Rod End Nut: None, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: A44--Reed, DC Volt >5 <24, AC Volt <200, LED, DIN, Lead Wire or Prewired Connector: -, Number

Magnet: Built-in, Model: Stainless Steel, 7MPa, Mounting: FA [Front Rectangular Flange (for 3.5, 7MPa)], Bore Size: 50mm, Rod Dimension: Series C Rod Size, Stroke: 100mm, Rod End Nut: None, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: B53--Reed, DC Volt >5 <24, LED, Lead Wire or Prewired Connector: 3m, Number: -