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Before Use Fieldbus device EX250-SCA1A : Output numbers are assigned to stations from side D to U of manifold in order. (Refer to manual of each valve manifold for the directions of side D and U). : Standard manifold is wired in double. Output numbers are assigned to side A and B alternatively. In case of single solenoid valve, output on side B is free.

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

IDX-OM-W032-D / Series IDFA22E-23C,K,L,R,T,V IDFA37E-23C,K,L,R,T,V IDFA55E-23C,L,R,T,V IDFA75E-23C,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps:/

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.

Suite D Poway, CA 92064 TEL: (858) 679-190s FAX: (858) 679-1904 ARGENTINA SMC Argentina S.A. CHILE SMC Pneumatics (Chite) Ltda.

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

45.5 55.5 55.5 37.5 34.5 24.5 24.5 24.5 30.5 3 20.5 13-/22-MXQ20(L) 81.5 75.5 78.5 43.5 47.5 37.5 27.5 37.5 35.5 3 37.5 27.5 17.5 27.5 25.5 33.5 65.5 68.5 73.5 23 13-/22-MXQ25(L) 92.5 64.5 92.5 50.5 56.5 46.5 36.5 36.5 50.5 3 46.5 36.5 26.5 26.5 40.5 40.5 54.5 82.5 73.5 27 800 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Basic 2 x M2.5 x 0.45 thread depth 3 2 6 Operating port 2 x M5 x 0.8

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

(LJ1S Series only) C D Running accuracy Model C plane to A plane D plane to B plane LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 0.07 or less 0.03 or less 0.09 or less 0.12 or less 0.1 or less 0.1 or less 0.07 or less 0.06 or less 0.03 or less 0.015 or less 0.1 or less 0.1 or less B A Actuator control Programming from a PC Programming and start-up: easy programming is possible by means of the

weight Space saving, light weight 50 40 46 33 60 74 LTF8 work piece mounting section dimensions LTF6 work piece mounting section dimensions 412mm 4.6kg 1000mm Values of the horizontal mounting type with standard motor and 100 mm stroke 357.5mm 2.2kg 600mm Overall length Weight Maximum stroke Table traveling accuracy Table traveling accuracy Lead screw Ground ball screw Rolled ball screw C D

1.0 1.0 1.0 1.0 Supply pressure MPa 0.9 0.9 0.9 0.7 0.8 0.9 0.6 0.7 0.8 0.9 0.9 Valve output pressure MPa Valve output pressure MPa Valve output pressure MPa Valve output pressure MPa 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 2000 4000 6000 0 0 0 200 400 600 800

E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

FRANKLIN ROAD INDIANAPOLIS INDIANA 46226 PHONE: 317-899-4440 FAX: 317-899-3102 TOLL FREE: 1-800-SMC-SMC1 1978-2000 SMC Pneumatics, Inc. All Rights Reserved. JB

Supply pressure MPa 1.0 1.0 1.0 1.0 1.0 1.0 Supply pressure MPa 0.9 0.9 0.9 0.7 0.8 0.9 0.6 0.7 0.8 0.9 0.9 Valve output pressure (MPa) Valve output pressure (MPa) Valve output pressure (MPa) 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 4000 6000 2000 200 400 600 800

ii'lri-tr'i"d'..r..t to the inside. Panel mount bracket Phillips type screwonver Removing Tube Installing Tube OPush in evenly on the release button. (DCul the tube perpendicularly, being caretul not to damage the oulside sulace, use tube culler TKA-1.

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.