Bag Filter

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

VNC

1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 Light/surge voltage suppressor Non-locking push type Non-locking extended type Locking slotted type 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

Copper-free Actuators

M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free

80

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Soft Start-up Valve AV2000/3000/4000/5000

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

ML2B

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

High performance type Step Motor Controller (Servo/24 VDC)

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi D SVON cation Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upper-level devices.

ZR

Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc. 13-3-13 13 Series ZR Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable.

OMR0032

LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

Step Motor Controller (Servo / 24 VDC)

Posn failed (1-149) D SVON Input *1) The connection with the higher-level devices (such as the PC and teaching box) is disconnected. RESET Ctrl Comm ALM (1-150) D SVON Do not remove the cable during operation by the controller setting kit or teaching box. Input *1) Abnormality in communication with the encoder.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

) (n = 2, 3, 4, 5) D-A9mV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) Band mounting D-C7m D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5

JXCx-OMT0062

*1) Procedures for resuming operation when alarm group D is generated 1.