ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Steam Valve

40 64 (12.5) 1(A) (Back side 2(B)) Main port Port size: refer to table below (1.6) 23 24 (21) 45 27 Bracket (Option) 2 x 4.5 2 x M4 x 0.7 depth 7 18 50 Main port 1(A), 2(B) Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 18 Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option)

High Pressure Coolant Valve

to 8 Pilot EXH port 10(P2) Silencer installed (Standard) EBKX-L7004-040: VNH1, VNH2 AN210-02: VNH3, VNH4 Light/surge voltage suppressor (For DZ) Pilot SUP port 12(P1) Manual override (Non-locking push type) N P2 P1 Main port 1 (Back side port 2) U: Female thread for bracket mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P

Precision Regulator

output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output Symbol A B C D ARM ARP Accessory (Pressure gauge) Pressure Switch Specifications Nil None IR1000 series: G33--01 IR2000 series: G43--01 IR-A Set pressure range (MPa) 0.1 to 1 G Resolution of setting and display (MPa) 0.001 IR IR 12 to 24 VDC10%, Ripple (p-p

Suction Filter with Case FH99 Series

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: None, Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2742A (Base Type)

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: R (Right), Proximity Switch: P (P & F), Metal Switch Cassette Cover: None, Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2742A (Base Type)

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: L (Left), Proximity Switch: P (P & F), Metal Switch Cassette Cover: None, Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2742A (Base Type)

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: R (Right), Proximity Switch: P (P & F), Metal Switch Cassette Cover: None, Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2742A (Base Type)

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: L (Left Side Mounting)

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: R (Right Side Mounting)

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: L (Left Side Mounting)

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: R (Right Side Mounting)

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: NPT, Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: L (Left Side Mounting)

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: NPT, Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: R (Right Side Mounting)

Series: CKZ3N, Bore Size: 63mm, Cylinder Port: TF (G), Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: C (w/Metal Switch Cassette Cover), Front Mounting: F (Yes), Top Cover: M (Metal Cover), Option: X2568 (w/Manually Operated Handle), Handle Mounting Position: L (Left Side Mounting)

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: NPT, Arm Opening Angle: 75 (75°), Arm Position: D (Both Sides), Proximity Switch: P (P & F), Metal Switch Cassette Cover: None, Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2742A (Base Type)

Series: CKZ3N, Bore Size: 50mm, Cylinder Port: NPT, Arm Opening Angle: 75 (75°), Arm Position: L (Left), Proximity Switch: P (P & F), Metal Switch Cassette Cover: None, Front Mounting: F (Yes), Top Cover: Rubber Cover, Option: X2742A (Base Type)