Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
5/18-18 0.62 0.72 0.47 90 1.17 0.28 3.47 0.09 1/8 NPT 0.41 3/4-16 0.88 0.85 0.51 45 1.50 0.31 3.91 0.09 1/8 NPT 0.50 1 1/4-12 1.19 1.20 0.81 45 1.91 0.59 5.11 0.12 1/4 NPT 3 Series NCM-A Dimensions ZB + STROKE LB + STROKE 0.50 W K A L ZC 2-ZD MM YC WA N KK UNF-2A B -0.003 0.000 PILOT Y WB D ACROSS FLATS NN UNF 2A Bore MM KK A B D E F GA GB K L 075 (3/4") 0.250 1/4-28 0.50 0.624 0.86 0.38
CN2TB/PC () 19 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 () 4 0V 5 FG FG (LEC)(0V) ULUL1310Class2 6.2 2) AWG20(0.5mm (24V0V) 60 2) EMG AWG20(0.5mm (EMG+,EMG-) 60 8mm 20 - D(100) D 6.3 (CN2SW)ON(EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC) OFF (LEC)(EMG+,EMG-) 21 - (LEC) ( LEC6) DC24V 0V Ry EMG+ Ry EMG(1) BK RLS EMG Ry C 24V 24V
P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.
C D Can be mounted 2 ways Improves ease of mounting the unit. A B Table running accuracy (mm) The LG1 series provides a stainless steel frame (LG1TH) for customers who required rigidity with an extendable aluminum frame. Refer to page 41 for further details.
Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h
How to Order Valve 10 VQ110 External non-leak specifications 9 Series VQ100 Base Mounted Plug-in Unit The broken line indicates DIN rail mounted type (-D) and side entry connector (S).
K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9
E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.
Order with the option symbol -D to specify DIN rail mounting style.
Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.
Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.
Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)
Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.
Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE
Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20