C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

CLS

As a guide, it should be turned about 90 past the point at which tightening can be felt. 9-9-23

CS1

14 36 43 29 32 25 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 50 47 75 15 31 161 128 M14 X .5 36 90 43 14 16 32 17 59 35 36 28 to 1000 3/4 M36 X 1.5 56 53 80 36 18.5 17 182 144 M16 X 1.5 20 40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Tightening torque (Nm) 0.8 to 1.2 Hexagon socket head cap screw 11-6-4 5 Mini-rotary Actuator Rack & Pinion Style Series CRJ How to Order CRB2 Rotating angle CRBU2 90 100 180 190 90 100 180 190 CRB1 MSU CRJ B 05 90 E M9B S Basic type CRJ CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

to 0.5 Basic type CRJB1 0.40 1 With external stopper CRJU1 2.0 Weight Weight (g) Note) Type Model CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type CRJB1-90 54 CRJB1-100 1 CRJB1-180 67 CRJB1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU1-90 70 1 CRJU1-180 81 Note) Values above do not include auto switch weights. 11-6-6 7 Mini-rotary Actuator Series CRJ Rotating

Modular Design with Uniform Body Style

80 AC50-D/AC60-D Model E F G H Applicable size VHS20-D 28 42 17.5 40 AC20-D VHS30-D 38 53 20 53 AC30-D VHS40-D 52 71 29 70 AC40-D VHS40-06-D 52 71 29 70 AC40-06-D VHS50-D 72 90 33 90 AC50-D/AC60-D Caution on Mounting Use an air filter on the inlet side for operating protection.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

"n" pcs. 90 Same side 120 75 (n 4) 2 (n 4) 2 (n 2) 2 120 + 50 15 + 50 90 + 50 Different sides n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 6, 8 D-B5, D-B6 (n 2) 2 (n 2) 2 90 + 50 120 + 50 75 + 50 (n 2) Same side n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 90 1 pc. 120 10 120 Different sides 20 90 2 pcs. "n" pcs.

Air Cylinder Series MB

D-A3 D-G39 D-K39 n (different side) 90 + 100 (n2) n = 2,4,6,8... 125 + 100 (n2) n = 2,4,6,8... n (same side) 1 60 65 75 80 85 90 90 90 2 (different side) 2 (same side) 70 75 80 85 70 75 80 85 70 + 30 (n2) n = 2,4,6,8... 70 + 50 (n2) n = 2,4,6,8... 75 + 30 (n2) n = 2,4,6,8... 80 + 30 (n2) n = 2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 75 + 50 (n2) n = 2,4,6,8... 80 + 50 (n2) n = 2,4,6,8... 85

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0 Bracket Symbol Option Nil None D Oil-free Symbol With bracket Size 30 40, 50, 60 70, 80, 90 Nil None V V V B With bracket V V *1 M12 connector without cable (With surge voltage suppressor)*2 All voltages WN *1 Sizes 70 to 90 are not available with a bracket. *1 DC voltage only *2 A cable for the M12 connector is not included with the product.

A

254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

Series KV2 Fittings

Dont use a wrench on push-to-connect end. 2 2 Cut tubing square with a clean 90 edge Dont use excessive tube angle cut which can lead to leakage or breaking. 90 90 3 3 Use SMC Tube Cutters Dont use dikes, a knife, a saw or a dull tool to cut the tubing.

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

CXS

, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series CXS Made

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Free Mount Cylinder

(g) JIS Symbol Double acting, Spring rod Stroke (mm) Model 40 50 60 70 80 90 100 43 (53) 49 (59) 50 (65) C(D)U6-D 64 (74) 72 (82) 80 (90) C(D)U10-D 92 (122) 104 (134) 116 (146) C(D)U16-D 216 (253) 238 (275) 260 (297) 282 (319) 304 (341) C(D)U20-D Made to Order Specifications (For details, refer to P.43.) 363 (422) 397 (456) 431 (490) 465 (524) 499 (558) C(D)U25-D Symbol Specifications

Air Fittings & Tubing

P.2.1-22 Plug-in elbow Different dia.tee Straight union Used to change by 90 in a tube fetching direction from Onetouch fittings. P.2.1-14 KQ2H KQ2L KQ2T Used to connect tubes with size down in both 90 directions. Used to connect tubes in the same direction.

Single Axis Electric Actuator Series LJ1H

82 A section 1.7 4.8 5.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 92 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 8-6.6 92 9.4 4.5 10 58 30 Stroke + 216 18 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

Table of Contents

(100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1

MRHQ

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566