TA301

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold Model Model VOA301 Applicable manifold model Common/lndividual exhaust Accessory (Part no.)

VT325

V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Grommet VP Exploded view VG VP (1) Bleed groove Bleed port on main valve (4) S070 (7) VQ Bottom of the solenoid valve (5) VKF 2.

VFRA3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VPA4270-14 Port size VR VPA4150-04 Port size Applicable valve model Note) 3 position is not available on Series VPA470.

VFN2000N

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JIS Symbol Single solenoid VZS 4 2 VFS Rated voltage VS4 5 1 3 Double solenoid Electrical entry VQ7 4 2 Apparent power AC (Power consumption) EVS 5 1 3 Electrical entry VFN Note 1) Use dry-air at low temperature.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

M6 x 25 AXT335-12-3 AS568-015 Hexagon socket head screw Gasket O-ring i o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Part no.

Cylinder with Lock Series CLS

0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 2 3 4 5 2m 3m 4m 5m 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right Left Top Bottom Axial entry Right entry Bottom entry Specifications 100 5.4 200 6.1 300 6.9 400 7.7 500 8.5 600 9.3 5 to 40 (with no condensation) 5 24 300 700 10.0 900 11.6 1000 12.4 800

High Vacuum Angle Valve, XL Series

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

-3.5-W/K 3.5 PSI with Adjusting Knob $37.95 RMW-800-10-W/K 10 PSI with Adjusting Knob $37.95 RMW-800-30-W/K 30 PSI with Adjusting Knob $37.95 RMW-800-60-W/K 60 PSI with Adjusting Knob $37.95 RMW-800-90-W/K 90 PSI with Adjusting Knob $37.95

Electro-pneumatic Proportional Valve Series VEF/VEP 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S. IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Safety Instructions

Supply voltage Internal voltage drop of switch Voltage of operation load > Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

VND

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Body material: Bronze, Stainless steel VXA Cylinder actuation by external pilot air VN LVC LVA Large valve capacity PTFE seal LVH LVD LVQ LQ LVN Wide variations TI/ TIL 2 types N.C., N.O.

VNH

VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping Caution VX3 When high temperature fluids are used, use fittings and tubing with heat resistant features. (Self-align fittings, Teflon tubing, Copper tubing, etc.)

Interface Regulator for VQ4000 5 Port Solenoid Valve

1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035