LFE-OMY0008

4 4 4 M12 IN OUT ( ( ( (2 2 2 2 ) ) ) ) ( ( ( ( ) ) ) ) UP UP UP UP SET SET SET SET DOWN DOWN DOWN DOWN (2 ) () OUT1OUT2 ON : UP ON/OFF SET DOWN ON/OFF 13 No.LFE*-OMY0008 F F.S.( 15V F.S.=5[V]1[V]4[V](1F.S.4[V]10.04[V]) a 1-5V 1-5V 4-20mA (HYS) ON OFF 63% ka () sa 10 L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12

JXCx-OMT0030CN

93.75k 187.5k 500k 1500k 12000k (bps) (m) 1200 1000 400 200 100 IF RS485(Modbus ) 115.2k 230.4kbps 115.2kbps 28m 3m 5m 5m 5m 5m 5m 10 - 0 40 90%RH ) -10 60 90%RH ) 2(0.5G) 4.9m/s IP20 200g() 220g(DIN ) 11 - 32 1 LED 2 ADDRESS X1X10 3 B RATE IF X100 4 CN2 SW IF CN2 5 CN4 EMG 6 CN3 Profibus 7 CN2 TB/PC LEC (LEC-T1)(LEC-W2) 8 CN1 CONT IF LEC 12 - 33 1LECGPR1 (

Process Pump Series PA3000/5000/PAX1000 Series PB1000

16 20 8 24 2 4 6 8 10 12 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (for PA3000) PA313 Air consumption 160 Required specification example: Find the pilot air pressure for a discharge rate of 4l/min and a total lifting range of 15m.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

16 20 8 24 2 4 6 8 10 12 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (for PA3000) PA313 Air consumption 160 Required specification example: Find the pilot air pressure for a discharge rate of 4l/min and a total lifting range of 15m.

AS_FS Inline

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

Soft Start-up Valve AV2000/3000/4000/5000 1

ITV IC 1 2 Proper tightening torque (Nm) Tightening Torque when Piping VBA Connection threads Rc 1/4 12 to 14 VE Rc 3/8 22 to 24 Terminal 1 2 Rc 1/2 28 to 30 DIN terminal + VY1 Rc 3/4 28 to 30 Rc 1 36 to 38 G Lubrication 4. Piping to products When piping to products, avoid making an error of supply port, etc., by referring to the instruction manuals. 5.

-- NCM seies

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

FH series suction filters are compact and lightweight. Designed with an aluminum casted housing. Element can be replaced by simply opening the cover to detach the element without touching the pipes. The filter can be fitted with a differential pressure indicator which senses when the element is becoming dirty, facilitating maintenance and helping to avoid pump damage such as cavitations.

Refrigerated Air Dryer

plate type heat exchanger (IDFB4E to 75E) AMD Power supply voltage: Single-phase 115 VAC (60 Hz) 230 VAC (60 Hz) Three-phase 460 VAC (60 Hz) AMH AME Air flow capacity SCFM (m3/h [ANR]) Series Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(10C) IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E NPT3/8 10(17) 11(19) 12

A

When screwing fittings into valves, tighten with the torques given below. 1 2 Tightening torque for piping Terminal 1 2 Proper tightening torque Nm Connection threads DIN terminal + Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Lubrication Rc 1 36 to 38 Caution 4.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

FH series suction filters are compact and lightweight. Designed with an aluminum casted housing. Element can be replaced by simply opening the cover to detach the element without touching the pipes. The filter can be fitted with a differential pressure indicator which senses when the element is becoming dirty, facilitating maintenance and helping to avoid pump damage such as cavitations.

ITVH

Connection thread Recommended proper torque [Nm] M5 1.5 to 2 1/4 8 to 12 3/8 15 to 20 2. Do not allow twisting or bending moment to be applied other than the weight of the equipment. Provide separate support for external piping, as damage may otherwise occur. 3.

Micro-Mist Separator with Prefilter Series AMH

6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm)

LV50-OMQ0002

If the minimum setting unit is 1 L/min, the display will change in 1 L/min steps, e.g. 10..11..12 L/min. -14No.LV50***-OMQ0002-G Term Meaning O Operating fluid temperature Range of fluid temperature that can be measured by the product. Operating pressure range The pressure range in which the product can be used.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Place the O-ring on the O-ring mounting surface. 12 XL-OMO0001-A Step 5 O-ring Bellows holder Wipe off any dust from the valve seal O-ring and the Bellows holder surface.

Clean Rodless Cylinder Series CYP

Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

Soft Start-up Valve AV2000/3000/4000/5000

4000/5000 Specifications AV4000 AV2000 AV3000 AV5000 Model 1/2 3/4 1 1/4 3/8 Port size 1.5MPa Proof pressure 0.2 to 1MPa Operating pressure range 1/8 Pressure gauge port size 0 to 60C Note 1) Ambient and fluid temperature 61 20 37 122 113 1(P)2(A) Effective area (mm) 76 24 49 141 132 2(A)3(R) 0.74 0.27 0.48 1.54 1.60 Weight (kg) Rated coil voltage 100, 200, 110 to 120, 220VAC (50/60Hz), 12

Clean Room Regulator/Fluoro Resin Type Series SRF30

Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

EX510-GPR1.eng

To SI unit Branch connector at cable side Pin #1: Brown wire To Input unit Insert branch connector on the table side from the bottom (COM A, B, C, D of branch connector of GW unit side). 2 13 12 Wiring (continued) (2) Make sure to connect a "terminating resistor" to the units at the both ends of the system.