5 Port Solenoid Valve SY Series

Type S, Z 12 or less 15 or less 2 position single 10 or less 10 or less 13 or less 2 position double 15 or less 16 or less 20 or less 3 position Type R, U Type S, Z 33 or less 38 or less 2 position single 27 or less 28 or less 30 or less 2 position double 50 or less 50 or less 56 or less 3 position SY9000 SY5000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

From the menu bar, click Parameters(U)-Edit Parameters(U). The Parameter Editing window will be displayed. 2. If you click on each item, such as "Function selection(Pn0xx-)" will be displayed parameter list of each item.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

air-filter-e

pressure proof 0.6 MPa 273 Low Maintenance Filter Series FN1/FN4 P.483 2 Replacement Procedure is Replacement Parts and Seal List FN111-10-S FN112-10-S FN4102-20-S i u y o i y o t OUT IN OUT IN OUT u IN DRAIN DRAIN DRAIN Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FN1/FN4.

Air Preparation Equipment

pressure proof 0.6 MPa 273 Low Maintenance Filter Series FN1/FN4 P.483 2 Replacement Procedure is Replacement Parts and Seal List FN111-10-S FN112-10-S FN4102-20-S i u y o i y o t OUT IN OUT IN OUT u IN DRAIN DRAIN DRAIN Number is the same as the Replacement Seal List of the Best Pneumatics No.7 Series FN1/FN4.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

] Approx. 300 (Lead wire length) 98.6[103] 79 [83.4] R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to the page 91 for dimentions with connector cable. 9 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H Grommet (G), (H): SYJ3 40-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 15.3 32 22 3 2.5 Manual override

TUH Series

20C (68F) bend the tubing into a U shape.

VVXA21/22

10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

VER2000/4000

6 q w e r t y u i Block packing !

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

This will prevent the oil filler plug from flying out. 126115AP GA46-10-02 AF11-2 126060 11307 126046 126047 126115AP GA46-10-01 AF11-2 126140 11307 Zinc die-casted, NBR Lubrication plug assembly Pressure gauge (2 pcs.) Bowl assembly Sealing (2 pcs.) O-ring Seal Seal y u i o !0 !1 !2 NBR NBR NBR NBR 126047 (2) !

Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

light 92.5 MAX.10 Indicator light 56 R 3 1 P Cover diameter 1.5 Applicable cord O.D.

Mechanical Valves Series NVM, NVFM, NVZNI

7 1 tlAl 0 9 6 tr^ 5' 1 2 6 (32) 1.42 (36) 1 2 0 J U 5 (6) Millimelers in Parentheses NVAm5GNo13 F U F 4.63lbs. (2.1 Kq) P.T. 0.17 in. 4.4 mn o.T. 0.0E an. l.0mm) T T O.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A E c D E F G H K M N P H 5.O7 (128 9) 4.39 (1 1 1.4) 1 1 8 (30) 1 6 9 t 7 5 '| _5 | 1 " (3) 080 20.4 1 5 7 a{I)l o71 alA) 0 9 6 24 S\ '1.26 (321 1 4 2 t36l 1 2 0 'io 5 ,2/ (6) Millimelsrs

IIIIIII

7 1 tlAl 0 9 6 tr^ 5' 1 2 6 (32) 1.42 (36) 1 2 0 J U 5 (6) Millimelers in Parentheses NVAm5GNo13 F U F 4.63lbs. (2.1 Kq) P.T. 0.17 in. 4.4 mn o.T. 0.0E an. l.0mm) T T O.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A E c D E F G H K M N P H 5.O7 (128 9) 4.39 (1 1 1.4) 1 1 8 (30) 1 6 9 t 7 5 '| _5 | 1 " (3) 080 20.4 1 5 7 a{I)l o71 alA) 0 9 6 24 S\ '1.26 (321 1 4 2 t36l 1 2 0 'io 5 ,2/ (6) Millimelsrs

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

NCA1

, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

NCA1

, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

ISG

Hysteresis adjusting bolt 75 110 175 Ex.)1S2761 Bellows assembly for 103L1 1S2761 Light and top cover assembly for 103L1 18 8.5 When replacing other parts, please contact SMC for repair, since it cannot be repaired by user. 2.3 56 3-6.3 23 20 32 10 29 10 26 79 99 126 R 3/8 16-9-8

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Meter-out Meter-in y y u u q w e r t q w e r t i i o o !