Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Cylinder with Lock

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 20 MWBW Series Dimensions Basic: MWBWB (Rc, NPT, G) BP GD GB GB Unlocked when pressurized GC GD GB GD (Rc, NPT, G) P Rod side cylinder port GC GA (Rc, NPT, G) P Head side cylinder port GE W GE W GE W (Rc, NPT, G) BP GF GA Manual lock release bolt Width across flats KC Cushion valve 32 4 x J Width across flats KA Thread depth MC Width

Series VQ Base Mounted Metal Seal/Rubber Seal

P kit (20 pin).

CL

601 to 1000 601 to 1000 751 to 1000 751 to 1000 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) FV GA GB GC J H1 K KA M M1 P MM N S W H ZZ e f h ZZ l 59 66 66 80 81 133 133 141 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4

Series SV

Mounting 20 Tie-rod base 20 stations Direct mount DIN rail mount (with DIN rail) DIN rail mount (without DIN rail) Nil D D0 D3 SS5V W 1 05 U 10CD Note) When a DIN rail longer than the specified stations is required. (Specify a rail longer than the standard length.) Cassette base For 3 stations SS5V W 05 16CD 1 U ... ...

Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Accessories (Optional) Hydraulic Fluid Compatibility Cushion Strokes (for Front & Rear) Bore size (mm) Effective cushion stroke (mm) 15 15 17 20 20 20 22 Knuckle bracket, Single knuckle Double knuckle, Bracket pin Knuckle pin Rod boot Hydraulic fluid Compatibility 40 50 63 80 100 125 160 Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible O/W hydraulic fluid Compatible

LEF-OM006xx

6 7 8 < -> LEFS40 LEFS40 10 60 60 10 50 50 W(kg) W(kg) W(kg) W(kg) 40 40 30 30 20 20 10 20 20 10 10 10 0 0 0 100 200 300 400 500 V(mm/s) 0 100 200 300 400 500 V(mm/s) -10- (2)DC24V LEFS16A LEFS25A (mm) 1) 100,200,300,(400) 100,200,300,400 500(600) 7 10 11 18 (kg) ) 2 4 2.5 5 (mm/s) 2) 10500 5250 12500 6250 (mm/s 2) 3,000 (mm) 0.02 (mm) 10 5 12 6 (m/s 2) 3) 50/20 () 540 (%) 90

MXS Series Air Slide Table

When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work

SMC Pneumatic Clean Series

W X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

NCA1

, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order MOUNTING BORE STROKE SUFFIX NCDA1 W Ex: NCDA1WB 150-400 Auto-switch capable Double Rod Double Rod Basic Type NC A1WB (in) Bore (in) MM KK A AA B C D DD E EA EE G K LD P R WF Y ZM XT SD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !