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,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Bracket Nil B None With bracket Refer to the table (4) if a bracket is ordered separately.

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J MM NN R FC FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 M3 x 0.5 7 3.4 1.6 24 16 32 M10 x 1.0 10 10 12 15 17 5 13 8 6 7 20 7 M4 x 0.7 8 4.5 1.6 28 18 37 M12 x 1.0 15 12 14 20 19 6 15.5 10 6 7 24 9 M5 x 0.8 10 5.5 2.3 36 22 49 M14 x 1.0 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

AC Servo Motor Driver (SSCNET /H Type)

Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Compact Cylinder

(mm) D-A9 D-M9 D-F9 W D-F9BAL Auto switch model Symbol A B W A B W A B W Hs 22 24 27 30 36 41 20 25 32 40 50 63 15.5 15.5 19 20 13.5 15.5 8.5 10.5 12 12 18.5 20.5 11.5 11.5 15 16 9.5 11.5 5.5 7.5 9 9 15.5 17.5 3.5(1) 14.5 14.5 18 19 12.5 14.5 9.5 11.5 13 13 19.5 21.5 -9.5 -7.5 -6 -6 0.5 2.5 -0.5 1.5 3 3 9.5 11.5 5.5(3) Bore size (mm) 7 (4.5) 7 (4.5) 13.5(11.5) 15.5(13.5) The dimension inside

VEX1

terminal i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701 136 9 20 2.3 204 204.5 222.5 120 222 VEX VEX5900/5901 AN AMC 5.1-34 VEX5 Dimensions Select style VEX5510/E5511 VEX5710/E5711 Port size E F G H I J L M P A Model R T U B C K N O Q S D A,P port Rc(PT) , ,1 R port Rc(PT) VEX5510 VEX5511 1 2 3 4 , ,1 1 2 3 4

HRX-OM-X037

Series HRX-OM-X037 Contents 9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

20 Mechanically Jointed Rodless Cylinder Series MY3A/3B Side Support Side support A MY-SA 2-G E MX F 2-H B A D C MTS MY Side support B MY-SB CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50

CXT

D-F9W 12 A B W 16, 20, 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W A B 32, 40 D-A9 D-M9 D-F9W Auto switch model D-F9BAL Symbol A B W A B W A B W Standard Stroke 12 16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5

AC Servo Motor Driver (Pulse input type/Positioning type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial value Recommended Value Parameter *1,*2 Para No Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3. PA06 1 100 (Positioning mode: 10) Electronic gear denominator *3.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Stroke: S MXP10-10 Width across flats 1.5 Width across flats 5 A Piping port H 13 2-M5 x 0.8 (Plug: M-5P) 7 16.7 6.5 M3 x 0.5 3.7 21 20 8.5 19 0.5 A 4-M4 x 0.7 4-M3 x 0.5 depth 4 15 20 0.05 Prepared hole dia. 3.3 W 27 0.5 0.05 Piping port D B 2-M5 x 0.8 28 10 J 6 Mounting reference planes B D 10 9.5 Section AA MXP10-20 Without magnet and switch rail 8 2-M3 x 0.5 depth 3.5 For rail mounting

Vacuum Pad

Dimensions: With Buffer ZP3P-T20PTSFJM-B5 ZP3P-T20PTSFKM-B5 Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 5 1.6 5 Width across flats 14 Width across flats 14 3 3 3 3 17 21 A D B 17 21 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across flats 14 20 2.5 20 2.5 1.6 Dimensions Dimensions Part no.

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

LEF-OM006xx

.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V

OMR0031

Outside Inside the controller 10k (a) 1k (a) IN0 to SVON (b) (b) COM Caution Unused input terminals should not be in an unconnected (open) state.

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

HRX-OM-W060

HRX-OM-W060-B Operation Manual Installation Operation Original Instructions Thermo Chiller HRL Series HRL100-A-20 HRL200-A-20 HRL300-A-20 Keep this manual available whenever necessary 2019 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product).

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side