Clean Air Module

Nil Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1

3 Position Cylinder Series RZQ

Example) Assume circuit C with an operating pressure of 0.5 MPa, load weight of 10 kg, fluctuation to 20 kg and a cylinder bore of 32 mm.

Air Cylinder CLA Series Fine Lock Model

Air pressure lock-up Spring with air pressure lock-up An pressure Air pressure s'-pp,y exhausl I t Afpressure An p@ssure supPry 4rEst ! l Aiipresure Airpressure ertausr st)Ppty t l AirPrssure Airprasure erhast slppiy t l Lock releasing Locking Lock releasing Locking Air pressure drives the brake piston. Air pressure and spring force combine to drive brake piston.

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Air pressure lock-up Spring with air pressure lock-up An pressure Air pressure s'-pp,y exhausl I t Afpressure An p@ssure supPry 4rEst ! l Aiipresure Airpressure ertausr st)Ppty t l AirPrssure Airprasure erhast slppiy t l Lock releasing Locking Lock releasing Locking Air pressure drives the brake piston. Air pressure and spring force combine to drive brake piston.

MXU

(mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

MXU

25 30 TS Z S NS LS BS 45.5 46 37.5 14 20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40

Modular Type Filter Regulator Series AW

Note 3) The AW30 and AW40 bowl assembly comes with a bowl guard (steel band material). 59 Filter Regulator AW10 to 40 Dimensions AW10, 20 H M T D N Panel fitting dimension J Bracket (option) Y S U W IN OUT B C Z Q P IN OUT V Plate thickness AW10, AW20: Max. 3.5 K Pressure gauge port size Pressure gauge (option) OUT Square embedded type pressure gauge (option) O S Port size Drain E Min. clearance

A

How to Find the Flow Rate (at air temperature of 20C) Choke flow: when (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t : Air temperature Note) Formulas above apply

IDX-OM-V020

Note 6: Products other than Option R are not equipped with an earth leakage breaker. Purchase an appropriate earth leakage breaker separately. Use an earth leakage breaker with a leak current sensitivity of 30mA. Note 7: This is the value specified by IPCC4 AR4. The value specified by Class 1 Act on Rational Use and Proper Management of Fluorocarbons JAPAN is R410A GWP: 2090.

PSE550/300

(Not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F .S. or less 1.0% F .S. or less 1.5% F .S. or less Accuracy (To display value) (25C) IS Output current: 4 to 20 mA (Within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 ZSM Linearity: 0.2% F .S.

Power Valve: Economy Valve Series VEX5

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX592444 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None B Nil Bracket G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

Series AP3500

Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP3500 Suitable for UHP gas supply line Body material : 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP3540) Indicator switch available as an option (AP3550) How to Order (Inlet) (Outlet) AP 3 S FV4 FV4 540 2PW Size Cv 0.29 Code Option (

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

VXP21/22/23

LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA VXP2130: Option C, K, Q, S only.

Series DXT474

/LITHUANIA SMC Pneumatik A/S SMC Pneumatiques (Canada) Ltd.

High Purity Fluoropolymer

Then with one side fixed, gradually close the other side and measure 2R at the point where the tubing folds or flattens, etc. 2R Fixed side How to Order Burst pressure drop curve 1.00 Length TL0604 TIL01 20 20 Symbol 20 50 100 2S Type Length 20 m 50 m 100 m 2 m Metric sizes Burst pressure drop coefficient 0.80 Roll Inch sizes 0.60 Straight Please refer to the series chart and specifications

I/O Configurator (NFC version)

Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) : The analogue input update time can also be set for every Wireless Remote unit. Refer to "Remote setting" (page 38). DA refresh time -26No.EX-OMV0017-C (4) Remote registration Registration for wireless communication between the Wireless Base unit and the Wireless Remote unit.

I/O Configurator (NFC version)

Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) The analogue input update time is set for every wireless slave unit. Analogue input update time Define the address assignment direction of the EX600 I/O units connected to the wireless master unit. The address assignment direction is changed by mode 1/mode 2. Be careful about the I/O map.

I/O Configurator (NFC version)

Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) The analogue input update time is set for every wireless slave unit. Analogue input update time Define the address assignment direction of the EX600 I/O units connected to the wireless master unit. The address assignment direction is changed by mode 1/mode 2. Be careful about the I/O map.