New

29 145 85 29 145 21 145 21 145 43 14 145 43 14 220 220 220 220 220 220 340 340 340 340 460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1 Hexagon width across flats 22 6 6 Hexagon width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7 E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4 5 2 3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 Piston speed

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85

CXS

90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series CXS Made to Order Auto Switches Precautions Compact Type CXSJ Standard Type CXS With Air Cushion CXS With End Lock CXS Dual-Double-Rod Type CXSW Dimensions:

CY1

32 30 17 31 17 30 8.5 17 M5 x 0.8 x 7 8 CY1R20 9 9.5 5.2 3 1 22.8 6 39 37.5 39 36 21 38 24 36 7.5 24 M6 x 1 x 8 9 CY1R25 8.5 9.5 5.2 3 1 27.8 6 44 42.5 44 41 23.5 43 23.5 41 6.5 23.5 M6 x 1 x 8 8.5 CY1R32 10.5 11 6.5 3 1.5 35 7 55 53.5 55 52 29 54 29 51 7 29 M8 x 1.25 x 10 10.5 CY1R40 10 11 6.5 5 2 43 7 65 63.5 67 62 36 66 36 62 8 36 M8 x 1.25 x 10 13 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

LJ1H

L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 84 85 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

Air Fittings & Tubing

26.5 77.5 71.5 72 KQ2ZT10-02S 10 21 27.5 78.5 KQ2ZT10-03S 85 102 134 130 141 21 18.5 20.6 29 19.2 18.5 73.5 80 30.5 81.5 86 87 90 KQ2ZT10-04S 28.5 KQ2ZT12-02S 12 80.5 82 29.5 KQ2ZT12-03S 26 22 20.9 25.2 32 21.6 20.9 32.5 KQ2ZT12-04S Reference dimensions after R(PT) thread installation.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

KJ

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(R2) 5 (R1) Made to Order (For details, refer to pages 79 through 80.) 47 Series SYJ7000 Flow Characteristics/Weight Flow characteristics Note 1) Weight (g) Note 2, 3) Port size Valve model Type of actuation 14/2 (PA/B) 4,2 (A,B) 1,5,3 (P,EA,EB) 4/25/3 (A/BEA/EB) M8 connector 90 108 L/M plug connector 86 100 DIN terminal 107 142 Grommet Cv C [dm 3/(sbar)] Cv C [dm 3/(sbar)] b b Single 85

Air Cylinder CP Series Cylinder Positioner Assembly

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

130 350 325 440 297 330 Rc 3/4 560 530 470 540 325 260 85 130 Rc 3/4 297 315 330 440 IDFS11E 605 325 575 355 540 285 110 130 315 Rc 3/4 325 485 515 Note: The diagram above is drawn base on IDFS6E dimension with scale 1:6 6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

MXS Series Air Slide Table

118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16 on P. 60 for one with shock absorber as symmetric.

OMR0031

Controller and Peripheral Devices Specific Precautions 85 17.1 Design and selection . 85 17.2 Handling Precautions . 85 17.3 Installation . 87 17.4 Power supply . 87 17.5 Grounding . 87 17.6 Wiring . 88 17.7 Operating environment . 88 17.8 Maintenance . 89 18.

2/3 Port Valve

Environment Caution q Operate under conditions that are free of vibration and impacts. w Operate in an ambient temperature range between 0C and 50C. e Operate in an ambient humidity range between 35% to 85% (no condensation). For further details, refer to the instruction manual that is provided separately. 4.1-98

ZP

B L M Model Model ZPT06B-B-A8 ZPT10B-B5-A10 6 7 3.3 9.1 10 12 16 25 5.5 13.8 5.5 ZPT08B-B-A8 ZPT13B-B5-A10 8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E E E F F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85