Microspeed Cylinder

to 158F) With auto switch: 10 to 60C (14 to 140F) Without auto switch: 10 to 70C (14 to 158F) With auto switch: 10 to 60C (14 to 140F) 1 to 200mm/s (0.04 to 7.9in/s) Ambient and fluid temperature Ambient and fluid temperature Piston speed Piston rod diameter Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9in/s) 0.5 to 200mm/s (0.02 to 7.9in/s) 16 M8 x 1.25 M14 x 1.5 JIS class 2

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125 6.5 34 80 38 140 140 112 35.5 35 27 19 16 M14 x 2 27 15 100 247 16 112 170 16 34 M27 x 2 35 32 160 9 43 100 42 174 174 140 45 38 36 22 18 M16 x 2 28 17 110 275 18 140 197 18 38 M33 x 2 40 36 (mm) Without rod boot With rod boot Bore size (mm) P l R S T V W X Y H ZZ e f h ZZ 40 1/4 37 106 11 7.5 8 27 8 66 207 55 25 92 233 50 3/8 43 112 11 10 9

Guide Cylinder Series MGG

Auto switch capable (water resistant type) Note) RBL (coolant resistant) type shock absorbers are used. 20 to 50 Front mounting flange Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 Front mounting flange R Y + Stroke (mm) Bore size (mm) 63 50 40 32 25 20 R 16 16 15 14 14 14 Y 119 116 101 90 88 88 Dimensions other than the above are

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

CXWM/CXWL

For dimensions of the 25 stroke, refer to page 8-26-14.

Ionizer

Made to Order Symbol 3 Model with 40 mm-pitch emitter cartridges X15 16 36 L 14 14 Install the emitter cartridges at a 40 mm-pitch. (Standard: 80 mm-pitch) Maintenance detection level selection switch KJH04-M5-X34 30 20 Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Balance adjustment trimmer 14 19 20 16 Note) The maximum bar length is 1260 mm.

Intrinsically Safe Valve

Intrinsically Safe Environment UL913 & CSA157 Compliant Series 53-SY5000/7000/9000 NC300-C Dimensions Compact, High Flow Compact, High Flow B A L3 Model Dimension L1 L2 L3 53-SY5120-L 53-SY5120-LL 53-SY5120-TT 53-SY7120-L 53-SY7120-LL 53-SY7120-TT 53-SY9120-L 53-SY9120-LL 53-SY9120-TT 104 15 L1 120.8 40 118.2 L2 18 135 148.3 42 23 165.1 L2 Flow-rate Characteristics Flow-rate characteristics 14

EXxx-OMN0035CN

(EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Possible to transfer a workpiece at low-speed.

(mm) ND NC NB NA K GE GD GC GB GA EF EE ED EC EB EA Size 10 20 30 50 91.4 112.4 118.7 145.8 M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 20 25 27 32 15.6 19.5 21.5 28 11 14 14 18 7.5 9.5 9.5 11.5 45.2 56.4 61.5 72.9 10 14 14 19 5.5 8 8 8.5 12.5 16.5 16.5 19.5 4 4 4 6 47.1 57.1 58.4 74.4 44.3 55.3 60.3 71.4 33.5 43 46 56 14 18 19.5 22 80 100 110 130 Dimensions other than the above are the same as standard

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

Auto Switch Guide

Auto Switch Internal Circuit D-C73C Contact protection box CD-P12 Brown Choke coil LED OUT () Brown Weight Resistor Zener diode Reed switch Zener diode (g) OUT ( ) Blue D-C73C D-C80C Auto switch model Blue 14 14 0.5 Lead wire length (m) 53 53 3 D-C80C 83 83 5 Contact protection box Dimensions OUT () Brown Reed switch CD-P11 CD-P12 Lead wire with connector OUT ( ) Blue Indicator light D-C80C

Compressed Air Preparation Filter

v*14 v*14 v*14 v*14 *1 The drain guide is either NPT1/8 (applicable to the AFF20, AM20, and AMD20) or NPT1/4 (applicable to the AFF30 to AFF60, AM30 to AM60, and AMD30 to AMD60).

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating