ZQ

0.5, piping not required) 71.9 (63.1) (M5 x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.

MLGP

44 50 63 5.5 5.5 7.5 10.5 200 200 200 25 24 44 44 300 300 300 M5 x 0.8 M5 x 0.8 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121

MLGP

44 50 63 5.5 5.5 7.5 10.5 200 200 200 25 24 44 44 300 300 300 M5 x 0.8 M5 x 0.8 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121

MLGP

300 300 300 20 25 32 M5 x 0.8 M5 x 0.8 9.5 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30x 1.0 12 12 16 33 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 20 25 32 M6 x 1.0 M8 x 1.25 MLGPL (ball bushing)/Dimensions A, DB, E

MLGP

300 300 300 20 25 32 M5 x 0.8 M5 x 0.8 9.5 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30x 1.0 12 12 16 33 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 20 25 32 M6 x 1.0 M8 x 1.25 MLGPL (ball bushing)/Dimensions A, DB, E

CYP

g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis

CYPSeries

M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

CYPSeries

M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

REC

1.5 20 146 191 200 150 to 700 M8 X 1.25 5 8 33.5 5 20 30 1 8 M26 X 1.5 25 146 195 204 150 to 700 M10 X 1.25 6 8 37.5 5.5 20 34.5 1 8 M26 X 1.5 32 159 208 217 150 to 1000 M10 X 1.25 6 8 46.5 5.5 22 42.5 1 4 M32 X 2 40 181 236 247 200 to 1000 M14 X 1.5 8 10 56.2 7 26.5 51 4.9-11 Series REC Dimensions REC C/Single clevis 2-Rc(PT)P NN CDH10+0.058 0 G Relieving port M5 X 0.8 G Standard port H1

Precision Regulator

1/4 to 1/2 Port size IR IR 66 IRV 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 VEX Bottom bracket is not available as an option.

3 Port Solenoid Valve SYJ300/500/700 Series

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

CHKD/CHKG

D C D D CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L x 185L x 210L CQ-M8 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 145L x 170L x 195L x 220L x 245L C Model Mounting bolt

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Secondary Batteries

How to Order 90 For Compact Cylinders J B 40 8-125 Thread nominal size Series compatible with secondary batteries Nominal thread size Applicable cylinder nominal thread size 90 Material restriction 13-050 14-070 15-080 16-100 18-125 10-150 16-200 20-250 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 For compact cylinders/Female thread Applicable bore size (mm) Symbol

VQC

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP 1 X 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

CE

x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

Escapements Series MIW/MIS

thread 4-FE through FG FF FG FF Attachment mounting thread 2-FE thread depth FH FC FG FF FC NA FD NA FD FB FA Stroke adjuster Scraper RG RH SA (JA) SC SB Hexagon width across flats RB 2-M5 x 0.8 Supply port RA Stroke adjuster Hexagon width across flats RC RH RG RD At the maximum stroke RE Arrangement range RF RA RB RC RD RE RF RG RH RJ 8 10.5 M5 x 0.8 M8 x 1 6 9 Model MIW12-12 MIW20-20 8

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).