Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 89.3 (L = 300 to 5000) 83.7 M12 waterproof connector 53.5 48.5 24.5 16.5

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

RSQ

45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

VK3000

x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A G NPT R1 port: M5 x 0.8 R2 port: M5 x 0.8 P port: Rc 1/8 20 20 stations NPTF 3-2-3 Series VK3000 Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Combination of Blanking Plate Assembly and Manifold Base 5 port body

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.

Series SV

: Series SV3000 1in = 25.4mm 2 position single/double [M12 waterproof connector type] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 2-4.3 (Mounting hole) M5 x 0.8 (Pilot EXH port) 21 21.5 A B PE 38 46 SMC A B A B B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 6.4 (Light/Surge voltage suppressor

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5 x 0.8 (A, B ports) Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 Lateral connector entry Connector case attachment lever (both sides) (3.2) 101.2 3.5 (With switch mounted) 9 3.1 8 36.3 58.2 5.5

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

48

OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71

MXF

2.1 M3 x 0.5 1.2 MXF16 MXF16 6.7 6.7 M5 x 0.8 4.4 M4 x 0.7 2.8 MXF20 MXF20 8.5 8.5 M5 x 0.8 4.4 M4 x 0.7 2.8 Caution 0.02 mm or less of flatness is recommended.

125

: VEX3322 A perspective drawing 4 x 6 (For mounting) 2 x M5 Thread depth 7 (For foot bracket mounting) Manual override (Light/surge voltage suppressor) 45 34 + + 36 30 Foot bracket assembly (Option) 22 45 54 60 66 60.4 49.1 L plug connector Sol.b Silencer (for PE) (Option) 29.8 Grommet Sol.a M5 (Port PE/Pilot exhaust) M plug connector VEX3321: 1/8 VEX3322: 1/8 Plug (Port P1/Pilot air) 3 x

VZA200/400

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

2–4

30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 5 Compact

XL

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

CQM

30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 7-5-6 7

VZA2000

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side