5 Port Solenoid Valve Series SV1000/2000/3000/4000

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

5 Port Solenoid Valve

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

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19) J P.7 kit (P.25, 41) P.27 T kit (P.67, 79) P.69 L kit (P.81, 93) P.83 Specific Product Precautions P.119 S kit Cylinder Speed Chart Use as a guide for selection.

Table of Contents

Output reversal command O-NOT General purpose input no., State AND input wait command I-AND General purpose input no., State Input wait 90 OR input wait command I-OR General purpose input no., State AND input time out jump command T-AND Mounting with T-brackets (P-no.) label General purpose input no., State OR input time out jump command Input wait with time out function T-OR (P-no.) label

Compact 5-Port Solenoid Valve

p. 116 Electrical Wiring Specifications: Flat Ribbon Cable Connector p. 40 Spring Type Terminal Block Box, Terminal Block Box How to Order p. 43 Dimensions Spring Type Terminal Block Box: TC p. 45 Terminal Block Box: T p. 49 Connection/Electrical Wiring Specifications p. 53 Lead Wire How to Order p. 55 Dimensions p. 57 Electrical Wiring Specifications p. 61 Vacuum Unit ZK2 Combination

Table of Contents

Operating pressure P (MPa) P 0.7 MPa MTS 4.

ZP3

adapter Vertical VAC VAC ZP3-T VAC p. 138 p. 144 p. 150 p. 156 With adapter Lateral ZP3-Y Construction Precautions Mounting Bracket Assembly VAC VAC VAC p. 139 p. 145 p. 151 p. 157 With adapter VAC VAC VAC Vertical ZP3-T p. 140 p. 146 p. 152 p. 158 With buffer Lateral ZP3-Y p. 141 p. 147 p. 153 p. 159 With buffer VAC VAC VAC 134 Compact Type ZP3 Series Specifications Pad Material Material

Metal Seal/Rubber Seal Series VQ Body Ported

2-4-28 P. 2-4-23 P. 2-4-68 P. 2-4-59 P. 2-4-68 P. 2-4-60 P. 2-4-68 P. 2-4-63 Standard P. 2-4-92 P. 2-4-87 2-4-3 Series VQ/Body Ported: Variations Series VQ/Body Ported: Variations Manifold Variations F P T kit kit J kit kit Terminal block Flat ribbon cable connector (26, 20, 16, 10 pins) Conforming to MIL flat ribbon cable connector Flat ribbon cable connector (20 pins) D-sub connector Conforming

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P Construction t !

Table of Contents

Unit Series AC10B to 60B Dimensions A AC10B/20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L F.R.L.

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to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12 stations)/Double wiring For P, G, T, S kit (13 to 24 stations)/Double wiring For P, G, T, S kit (2 to 24 stations)/Single wiring L0 kit L1 kit L2 kit F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 U side D side EXH passage blocked Solid forming 1 to 8 stations The

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filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

Fluoropolymer Piping Equipment

reducing LQ1E-T-R 3 4 5 P.905 6 2 Tubing extension union tee reducing LQ1T-T-R 3 4 5 P.906 6 Note) Basic size With reducer 868 Fluoropolymer Fittings Hyper Fittings Tubing O.D.

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A B M G1/2 IN OUT 2 x M4 x 0.7 Thread depth 8 2 x P Port size L K I F 18 (D) J Conduit U E 280 C (42) 45 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier T A B IN OUT M 2 x P Port size L K F I (D) J (mm) Model Conduit terminal Conduit Grommet Electrical entry Port size P A B C E F I J K L T V 1/4, 3/8 1/2 88 (93.5) 22.5 30 D M T 55.5 (61) U T 49.5 (55) U U 50 20 4.5 5

Stability of suction position,

E N T S 1 Page 383 Features and Precautions for Vacuum Adsorption 2 Page 383 Vacuum Pad Selection P Vacuum Pad Selection Procedures P Points for Selecting Vacuum Pads A.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

S P R I N G E X T E N D NC J2 NC J2 A U T O S W I T C H C A P A B L E N U M B E R O F S W I T C H E S Not Switch Capable D Switch Capable With Built-In Magnet 2 Pieces S 1 Piece n n Pieces M O U N T I N G B O R E S I Z E See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange D Double Clevis (Except for 6) 6 (1/4) 10 (3/8) 16 (5/8) P O R

One-touch Fittings

P.101 M R G Uni UNF NPT M R Uni Metric size P.5 P.101 P.65 P.173 P.57 P.165 P.87 P.201 P.29 P.133 Inch size P.29 P.133 P.73 P.185 P.49 P.157 P.81 P.195 P.49 P.157 P.95 P.209 CAT.ES50-37D KQ2 Series One-touch Fittings KQ2 Series Compact and lightweight Improved tube insertion/removal Length 23% shorter Max. 1 30% reduction Dimensions Dimensions Insertion : force Height 24% shorter 1 20 15.5