NCRBIBwserbs

Position of pivot:Axis , w P s 1 2 OSo||t dob. of pivot: Passes through the center ol gravity, parallel to Position of oivot: Diameter Position side b, s 1 2 ,_w 2f " s ' s oThh dhk Position of pivot: Passes through one end perpendicular to the plate. Position ot pivot:Diameter .r=W.ts s 4 World Wide QS\E Support...

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY SYJ Piping Bracket : For manifold P: For body ported style to P, R, A port : Without bracket F: With bracket VK 3 port VZ Actuation VT 1 2 Normally closed Normally open VT "P" piping specification only.

Digital Flow Switch Series PFA For Air Series PFW For Water

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

Auto Switch Guide

Type P. 9-15-23 Band, Rail, Tie-rod Mounting CNS CLS CLQ MLGP RLQ MLU P. 9-15-26 Solid State Switches ML1C DGeneral Purpose Type P. 9-15-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 9-15-39 Direct Mounting 2-color Indication Type P. 9-15-42 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 9-15-50 Band, Rail, Tie-rod Mounting

Compact Electric Actuator Series LG1

actuation input Driver model SGDE-01AP SGDE-01BP Symbol S-ON P-CON P-OT N-OT ALMRST PCO SG ALM SG FG Symbol PULS PULS SIGN SIGN CLR CLR BK COIN SGCOM P-IN Normal rotation suppression input Reverse rotation suppression input Alarm reset input PG ouput C phase 0V Servo alarm output 0V Frame ground Positioning completion signal output 0V External power supply input +10% 15% +10% 15% Single phase

MGC

1.0MPa Cushion Min. operating pressure 0.18MPa (At horizontal non-load) Piston speed Piston speed 15 to 300mm/s Basic Front flange Mounting Cushion +5 to + 60C Ambient and fluid temp Refer to p.3.20-3 regarding other specifications and p.3.20-10 and 3.20-11 regarding dimensions.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

S Couplers Series KK/KK13

Lock 1 S Couplers Series KK Variations Plug (P) Socket (S) Male thread type Male thread type Body size Part no. Body size Port size Part no.

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

Electric Actuator / Slider Type 《 AC Servo Motor 》

rev) n [Type of Motor: S6,S7,S8] Absolute 18bit encoder (Resolution: 262144 p/rev) Encoder [Type of Motor: T6,T7,T8] [With LECSB-T/LECSS-T] Absolute 22bit encoder (Resolution: 4194304 p/rev) [With LECSC-T] Absolute 18bit encoder (Resolution: 262144 p/rev) Type Note 5) No excitation operating type unit Lock spec Holding force [N] 78 131 255 131 197 385 220 330 660 Power consumption [W] at

CE

P-67.5 (YG)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Floating Joint

DA00243 DA00189 JS80-22-150(S)-X530 JS100-26-150(S)-X530 DDimensions (mm) Model M A B D1 D2 E F G H1 J Center of sphere R Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force (N) Weight (kg) -X H2 JS80-22-150(S)-X530 JS100-26-150(S)-X530 M22 x 1.5 89.5 28 46 50 99 19 14 32 34.7 57.2 56.5 16.8 1.25 5000 0.58 Technical Data M26 x 1.5 110 34 55.5 59.5

Multistage Ejector (N)ZL Series

Standard (N)ZL212 40 V 54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx.

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5