Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Z T Nil S Z R U Power saving circuit is not available for W type.

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

Booster Regulator/Air Tank

VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Stations S42R Type Coil is located on same side as the A port. 2 stations 02 Coil is located on same side as the A port. S ... ...

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

VQ4000

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) Mitsubishi Electric Corp.: CC-LINK System Note 2) BB Note) Add 2 stations for serial unit mounting.

Membrane Air Dryer

Symbol Type Nil Rc N F NPT Port size G 100 30 50 60 75 Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 $ $ $ $ $ $ $ $ $ $ $ $ 1/4 3/8 1/2 $ $ $ $ $ $ $ $ $ $ $ $ Component equipment 100 30 50 60 75 Component equipment Nil H L L S L S L S Nil H L Mist separator AFM40 AFD40 Micro mist separator Micro mist separator regulator AWD40 Replacement Parts (Element for mist separator, micro

Free Mount Cylinder

T S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

ZP

How to Order T ZP2 02 U S 6 N Vacuum inlet direction Buffer stroke Symbol Stroke Direction Vertical Symbol 6 6 mm T Buffer specification Pad diameter Symbol Pad diameter 2 4 6 8 Symbol Specification S Ball spline 02 04 06 08 Pad material Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber N S U F GN GS Pad type Symbol U Type Flat Buffer Specifications

One-touch Fittings

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

VEX1

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1

Table of Contents

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

Modular Type Regulators Series AR

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Option Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30 AR 25

Valve Single Unit

Series Stations 02 3 SX3000 5 SX5000 2 stations 20 stations 20 7 SX7000 A/B port size Thread piping Thread type Nil Symbol Port size Applicable series Rc G F 1 8 01 02 1 4 SX3000 SX5000 SX7000 N NPT 02 1 4 NPTF T One-touch fitting (Metric size) Symbol Port size Applicable series One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting

Series AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

F Symbol 02 Note Stations 2 stations NKE Corp.: Fieldbus H System H Double wiring Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) 08 02 J1 8 stations SUP/EXH block fitting type 2 stations Specified layout Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) Nil L B Straight J2 (Up to 16 solenoids possible.)

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

SZ3000

OMRON Corp.: CompoBus/S System (8 output points) R2 Nil L B Straight Elbow type (Upward) Valve stations Mitsubishi Electric Corp.: CC-LINK System V Elbow type (Downward) Note Symbol 02 Stations NKE Corp.: Uni-wire System (16 output points) F 2 stations Pilot type Double wiring specification H 08 02 NKE Corp.: Uni-wire H System Nil R Internal pilot 8 stations External pilot 2 stations Specified