PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

CLQ

Solid state 3 wire, NPN Solid state 3 wire, PNP 2 wire 2 wire (Reed switch) (Solid state) Brown [Red] Brown [Red] Brown [Red] Load Load Brown [Red] Indicator light, protection circuit, etc.

ITV

Note 3) The minimum unit for ITV205m is 1PSI.

3 Port Solenoid Valve Metal Seal Series VZ200 1

DXT170-176-2-01 DXT170-176-2-02 100V 200V 100 VAC 200 VAC DXT170-176-2-03 110V 110 VAC DXT170-176-2-04 220V 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240V 6VD 12VD 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC circuit DC circuit NL: Neon bulb R: Resister D: Protective diode LED: Light emitting diode R: Resistor 4

I

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

MU

3 !4 !5 !6 !7 !

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

5 Port Solenoid Valve Series SV

SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) SOL.b SOL.a Single solenoid 74 (.163) 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult P/A regarding other voltages.

MTS

0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

Compact Cylinder with Air Cushion

(PNP) Grommet 12V 2-wire Connector 3-wire (NPN) IC circuit Diagnostic indication (2-color display) 5V, 12V 3-wire (PNP) Relay, PLC Yes 24V 12V 2-wire Water resistance (2-color display) Grommet With diagnostic output (2-color display) F79F 5V, 12V IC circuit 4-wire (NPN) Latch type with diagnostic output (2-color display) F7LF Lead wire length symbols 0.5m Nil (Example) A73C 3 m Z (Example

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

Square Tube Type Air Cylinder Series MB1

Y69A 3 wire (NPN) IC circuit 5V, 12V Solid state switch Y7P Y7PV 3 wire (PNP) Y59B Y69B 12V 2 wire Relay PLC 3 wire (NPN) 24V Yes Y7NW Grommet Y7NWV 5V, 12V IC circuit Diagnostic indication (2 color indicator) Y7PW Y7PWV 3 wire (PNP) Y7BW Y7BWV 2 wire 12V Y7BA Water resistant (2 color indicator) Note) Lead wire length symbol 0.5m .

DOC1020530

state transition command is sent by setting Bit0-3 and Bit7 of Controlword (6040h).

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 3) Operation manual is included.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Note 3) Operation manual is included.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic