XLAQ/XLDQ

(Not available for high temperature models) Note 3) Auto switch and solenoid valve are not attached. When a set including auto switch and solenoid valve is required, please add the symbols after the auto switch in How to Order at the end of the part number. External Seal/Valve Seal/S Valve Seal Assembly Model Flange (Valve) size Description construction no.

Cylinder Speed Checker

Cylinder Speed Checker (Built-in Magnet Cylinder) IN574-95/-73 Series RoHS Speed (mm/s) 3 measurement modes Time required for stroke (s) Operation count (Times) Realizes increase in efficiency with visualization of air cylinder operation.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Plug the appropriate supply port(s) according to the operating state. Dual rod cylinders have 2 supply ports for each operating direction (3 supply ports for 6 only). Plug the appropriate supply port according to the operating state. After the plugged port has been changed, check the port for air leakage.

ZB-OM00301

() 0.005MPa5kPa4 1000 P28 31 - No.ZB-OM00301 -550 2/ 1 30m/s 2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

Compact Guide Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Solid state auto switch 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

Refrigerated Air dryer Series IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

VER2000/4000

VER2000 Repeatability 3% F .S. Sensitivity 0.5% F .S. 1.5% F .S. Linearity 3% F .S. Lubrication Not required (Use turbine oil Class 1, ISO VG32 if lubricated.)

Series VCL

. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Process Pump

Tubing size Symbol 19 Main fluid connection size 3/4" Thread type Note 2) Symbol Nil N F Type Rc NPT G With nut PAF541 S S 19 0 1 Actuation Note 1) Option Fitting type Symbol 0 3 Actuation Applicable actuation Automatically operated Air operated Symbol 1 3 Fitting type LQ1 LQ3 Automatically operated Air operated Symbol Option Nil N None With silencer For AIR EXH: AN20-02 (: Either Nil or

SMC Pneumatic Clean Series

3 3 11.5 + Stroke 18 + Stroke 24 + Stroke A Built-in magnet [O] [Auto switch] [P] 16.5 + Stroke 23 + Stroke 29 + Stroke Rod end male thread Rod end nut / Accessory (Option) Rod end nut S X W V U Q R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

S Couplers

8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/2 Rc 3/4 Rc 1 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/2 Rc 3/4 Rc 1 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 Rc 1 1/4 Rc 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Refer to pages 227 to 230 for Specific Product Precautions. 342 S Couplers

Table of Contents

SOL.b SOL.a 3(EB) 5(EA) 1(P) Conventional tie-rod base type manifolds are also available. 34 pins connector allows up to 16 stations with double solenoids. 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specifications is not available for 4 position dual 3 port valves. 3(EB) port 5(EA) port 4(A) port B side coil 2(B) port 1(P) port 1-2-2 1-2-3 3 Series

Guide Table Series MGF

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

3 Port Air Operated Valve Series SYJA300

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

11-cuj-e

3, !4, !5 and grease pack. O-ring Seal kit !3 to !5 comes as a set. Use the kit number for each bore size. Single acting, spring return CUJB12-S-PS CUJB16-S-PS CUJB20-S-PS 12 16 20 CUJB12-S-PS CUJB16-S-PS CUJB20-S-PS Set of left nos. !3 and grease pack. Use the following part number for ordering a grease pack only. Grease pack part no.: GR-L-005 (5 g) 50

Guide Table Series MGF ø40, ø63, ø100 1

Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 Single acting Spring return Single acting Spring extend 20 20 CQSB20-S-PS CQSB20-T-PS from the table above. 25 25 CQSB25-S-PS CQSB25-T-PS Seal kits consist of item !3 contained in one kit, and can be ordered using the kit number for each respective tube bore size. Seal kits consist of items !2, !3 and !

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression