Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: 6C (6 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Model Type: Standard, Piping: H (Immersion Type), Tank Size: 6C (6 Inch, ø76 Hole), IN/OUT Port Size: 14 [1 1/2 (40A)], Thread: N (NPT), Outlet Pipe Dimensions: 1 (Pipe Projection: Short; Thread Type: None), Rated Voltage: None, Electrical Entry: None, Fluid and Ambient Temperature: B (-40 to 60°C)
Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: 6C (6 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Float Type Auto Drain), Attachment: Standard, Semi-Standard 1: 6C (6 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 6C (6 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1 (Refer to pages 15-6-3 to 15-6-5 for details.) Note 2) Brass parts are all electroless nickel plated.
Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.
3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions
SF SF <3/8"> Piping O.D. 3/8" = 9.53 mm Stainless steel tube Nut Swagelok fittings by Swagelok Company VCR female nut (SS-8-VCR-1) Gland Swagelok fittings by Swagelok Company VCR gland (SS-6-VCR-3) Gasket Swagelok fittings by Swagelok Company VCR gasket retainer assembly (SS-8-VCR-2-GR) SFD LLB AD GD Be sure to conduct a helium leak test before using similar fittings from other companies
t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.
R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported
t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.
4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.
(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133
Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective
9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !
Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5
Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry