Speed Controller with

L8 x n pcs.+ L17 x 2 L8 x n pcs.+ L25 x 2 L8 Refer to page 6 for L8.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2 !0 r e t Piston seal NBR !3 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents MXPJ6-PS 6 2 pieces of no. !2 and !3 8-8-12 12 Precision Air Slide Table Series MXP MXP10/12/16 q i o w e !1 !9 u !0 !4 !3 !

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Compact Cylinder Series NCQ8

, 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The display unit conforms to the CE mark.

48

50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2 16 (12 x 2) 3.4 6.5 2 M3 x 0.5 6.5 16 18.5 8 28 14 53 42 57 10.2 24 M4 x 0.7 6 4.3 6 JMGP Series Bore

Check Valve Series AK 1

Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Component Parts No. t y e w r q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Soft Start-up Valve AV2000/3000/4000/5000 1

16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4,

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

Compact Cylinder

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 kW = 6 V Example: Load impedance is 3 kW. Leakage current from auto switch is 1 mA.

Gun Type Ionizer

Static Neutralization Characteristics q Installation Distance and Discharge Time (Discharge Time from 1000 V to 100 V) IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 1) Number of needle rotations [2] 2) Number of needle rotations [4] 3) Number of needle rotations [6] 5.0 4.5 4.0

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

S070

) 22 VT 2-3.4 Mounting hole 6.4 VP VG VP n U side 1 2 3 4 5 D side S070 VQ (21.5) (10.5) 21.5 2 2 VKF 3.9 P = 7.2 11 VQZ n-M3 x 0.5 2 (OUT) port VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 8.8, L2 = n x 7.2 + 14.8, n: Stations (maximum 20 stations) n L 12 95.2 101.2 19 145.6 151.6 2 23.2 29.2 3 30.4 36.4 4 37.6 43.6 5 44.8 50.8 6 52 58 7 59.2 65.2 8 66.4 72.4 9 73.6 79.6 10 80.8 86.8 11

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Vacuum Pad

flats 14 25 2.5 25 2.5 2 2 Dimensions Dimensions Part no.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

MY1

6 !3 !1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !