VQ5000

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

70astamb1

37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up

mb1

1 !6 !3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-04 FH540-06 FH540-08 FH540-10 FH540-12 10 3/8 3/8 10 FH541-04 FH541-06 FH541-08 FH541-10 FH541-12 FH541-16 15 (1/2B) 20 1/2 1/2 20 20 (3/4B) 20 (3/4B) 50 3/4 3/4 50 Max. 14 MPa Max. 3.5 MPa 25 (1B) 25 (1B) 80 1 1 80 FH341-10 FH341-12 FH341-16 32 (1 1/4B) 32 (1 1/4B) 120 1 1/4 1 1/4 120 40 (1 1/2B) 40 (1 1/2B) 160 1 1/2 1 1/2 160 50 (2B) 50 (2B) 260 260 FH440-03 FH440-04 FH440-

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

10

Symbol O.D. thread size Stroke 0805 1006 1410 8 mm 5 mm 2 pcs. 1 pc. 10 mm 6 mm 3 pcs. 1 pc. 14 mm 10 mm 1 pc.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

VHS

VHS2500 VHS3500 VHS4500 VHS5500 Model 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 1 1(P)/2(A) Piping port 1/2 1/4 1/8 3/8 3(R) 110 (6.11) 130 (7.22) 16 (0.89) 31 (1.72) 10 (0.56) 14 (0.78) 22 (1.22) 38 (2.11) 57 (3.17) 1(P) 2(A) Effective area (mm2) (Cv) 2(A) 3(R) Combination with a modular style FRL is possible. 33 (1.83) 40 (2.22) 14 (0.78) 29 (1.61) 11 (0.61) 16 (0.89) 15 (0.83) 29 (1.61) 51 (2.83

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

MLGC

style. 3.2-10

17

1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

Vacuum Filter AFJ Series

Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

Air Pilot Operated Series NVSA

B End AXT 334-16-2 Q *-r iN I Gasket . Pilot Cover & Spacers (4) Buna N AXT 334.7N-1 9 Soacer. "A" End AXT 334-16-1 10 Bushing.Body t2\ axT 334-22-6 1 1 Cushion-Pilot Covea A' End axT 3s4-12.1 PILOT COVER '1" enol"a" ero '124 Type "O" w/o Operators d(4) Screws (ea.) 12) Alum. D.C. PC 0102-1 I N 124 Typ "N". w/operator & (4)Screws (ea.) (2) Alum. D.C.

Clean Regulator/Fluororesin Type

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Heavy Duty Stopper Cylinder

4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !