reduces flow setting time 5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.
e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon
8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !
8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No.
Note 3) ( ) in column W is the dimensions of D-A93.
l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS25A100, 200, 300400, 500, 600112.512 to 5003,000o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation);4236Servo motor (24 VDC)Incremental
Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS32S3100, 200, 300, 400500, 600, 700, 800401010001000800620500??
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (