BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

Title not found

Approximate SCFM flow though Sharp Edged Orifices PSI Across Orifice Orifice Diameter, in Inches 1/64 1/32 1/16 1/8 1/4 3/8 1/2 5/8 3/4 7/8 1 5 0.062 0.249 0.993 3.97 15.9 35.7 63.5 99.3 143 195 254 6 0.068 0.272 1.09 4.34 17.4 39.1 69.5 109 156 213 278 7 0.073 0.293 1.17 4.68 18.7 42.2 75.0 117 168 230 300 9 0.083 0.331 1.32 5.30 21.2 47.7 84.7 132 191 260 339 12 0.095 0.379 1.52 6.07 24.3

Title not found

Approximate SCFM flow though Sharp Edged Orifices PSI Across Orifice Orifice Diameter, in Inches 1/64 1/32 1/16 1/8 1/4 3/8 1/2 5/8 3/4 7/8 1 5 0.062 0.249 0.993 3.97 15.9 35.7 63.5 99.3 143 195 254 6 0.068 0.272 1.09 4.34 17.4 39.1 69.5 109 156 213 278 7 0.073 0.293 1.17 4.68 18.7 42.2 75.0 117 168 230 300 9 0.083 0.331 1.32 5.30 21.2 47.7 84.7 132 191 260 339 12 0.095 0.379 1.52 6.07 24.3

CLA

D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

HRX-OM-R028

Key-lock set data which is set in 5.8.5 Command:LOC Key-lock setting (W) is not the object to store.

HRX-OM-T004

Key-lock set data which is set in 5.8.5 Command:LOC Key-lock setting (W) is not the object to store.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]

Single Axis Electric Actuator Series LJ1

400 500 600 700 800 900 1000 1200 1500 LJ1S101SC 50W to 300 LJ1S202SC 100W to 300 LJ1H101SC 50W to 500 LJ1H101PB 50W to 600 LJ1H101NB 50W to 600 Standard motor LJ1H202SC 100W to 500 [Tamagawa Seiki Co., Ltd.]

I/O Configurator (NFC version)

R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. R/W detection/ R/W no-detection button 5 R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.

I/O Configurator (NFC version)

R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. R/W detection/ R/W no-detection button 5 R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.

HRX-OM-O021

fluid temperature[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig. 9-6 Heating capacity

I/O Configurator (NFC version)

R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. 5 R/W connection status R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

Title not found

Body opton.ombi.albn s Nominal bore size Actuation ffi 1 Nol aEiab e wilhout auo switch 1 Nol a ab e wilh Doub e fod (W) r Nol a@ lable w lh spr n9 retum or spr n9 xlsd orwrrh supercompacr typ (z) .

I/O Configurator (NFC version)

R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).

RHC

Note Material Rod cover White anodized Aluminum alloy q RZQ Head cover White anodized Aluminum alloy w Cylinder tube Hard anodized Aluminum alloy e MI W S Piston rod Hard chromate plated Carbon steel r Piston Hard anodized Aluminum alloy t CEP1 Bumper Urethan y Plastic magnet u CE1 Bushing i Relief valve assembly L o CE2 Relief valve assembly R !0 Plate !