High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Air Catch Sensor

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

CEx-OMQ0011

100 50 50 0 0 0 5 m/s m/s 19 4-3.

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

VXR21/22/23

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

LEJ-OM004xx

cable Nil Without driver Nil Standard cable S LECSA1S A1 100 to 120 Robotic (Flexible cable) R A2 LECSA2S 200 to 230 *4 Whe n [With d river] is sele cted, cable is include d.

VNC

When the pilot solenoid valve is energized (or when pressurized air enters through the 10(P2) port of the air operated style), the valve body closes. w e Plate assembly Valve element Valve cover Piston assembly Return spring Pilot solenoid valve Stainless steel r 32A to 50A are O-ring. NBR, FKM t Aluminum alloy Piano wire y u i Note) et components determine the valve composition.

212

22 80 120 189 C F E Breathing port M5 x 0.8 J Integral ttings/LQ1 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-V07(06) 40 40 49.3 68 20.1 LVR40-V11(10) 82.5 82.5 89 115 33 LVR40-V13(12) 82.5 82.5 89 115 33 LVR50-V19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-V07(06) 8 27 56 77 LVR40-V11(10) 14 64.5 100 140.5 LVR40-V13(12) 14 64.5 100

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

KT10

How to Order Port Number e r KT10 R C 4P 4 1 0 0 Installation option Delivery pressure Code Installation Panel installation Delivery pressure Code 5 to 500 psig (0.034 to 3.4 MPa) 5 to 800 psig (0.034 to 5.5 MPa) 10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) 1) No code

Rotary Actuator NCRA1 Series Single Rack and Pinion

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

VK300

D LED R R NL (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more 1 2 + 1 2 1 2 NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 1418 A

ITV

Cable connector (4 wire) Right angle type Cable connector (4 wire) Straight type n50 4-7 Mounting hole 31 SMC PREGULATOR E SMC PREGULATOR E RESET 40 52 ITV2090 ITV2090 SET UNLOCK LOCK 84 100 12.5 M12 X 1 Cable connecting threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc(PT)1/4 VAC port OUT 2 G ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114

XL-OMY0002

R Chemraz VALQUA.CO.JP R ULTIC ARMOR 25 40 50 63 80 100 160 H4100 XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 (2 ) (3 H5120 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110

Air Slide Table Series MXQ

Nil S n L Auto switch type Nil Without auto switch Cylinder bore size (stroke mm) Refer to the table below for auto switch part numbers. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil F R Note 2) Standard With buffer With

OMU0023

How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.

VK300

Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 4-5-10