CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RB Operating Precautions J Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution -X 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

3 Way,3 Port Solenoid Valve NVZ Series

(l\.,15) 0.15 (70) A-R 0.05 Body ported type NVZI2SSg-M5 N.O. 0 70PSl (0 -5kgt/cm'?) 22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

1.63

Note 2) The tightening torque for the hexagon socket head cap screw (M2.5 x 12 L) is 0.2 to 0.3 Nm. Auto switch mounting screw Auto switch Hexagon socket head cap screw (Included with auto switch) (M2.5 x 12 L) Mounting of auto switch When tightening the auto switch mounting screw, use a watchmakers screwdriver with a handle 5 to 6 mm in diameter.

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Cylinder with Lock Series CNG

Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L A Applicable bore size (mm) MM R R1 U1 NDH10 NX Applicable pin part no. A1 E1 L1 RR1 Part No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads NPT Model L H A M W E Applicable tubing O.D.

33

x Depth 580 HRSE018-A-23 HRSE024-A-23 HRSE012-A-23-T 48 Height 790 x Width 470 x Depth 580 HRSE018-A-23-T HRSE024-A-23-T IDH Selection Warning 1.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT L/A IN and L/A OUT LEDs are OFF. LINK has not yet been established. communication cables are connected and there are no broken wires. (3)Keep noise sources away from the communication cable. 12 : The L/A OUT LED will be OFF if the BUS OUT connector is not used.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Applicable Auto Switch Model

Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

PF2D

ZSM PF2 IF Sensor Flow range Data 4 l/min 20 l/min 40 l/min 1.8 l/min 0.4 l/min 10 l/min 0.4 l/min 4 l/min PF2D504 4.5 l/min 0.25 l/min 1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min 4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-47

Single Axis Electric Actuator Series LJ1H

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

ZP

P G H: M6 x 1 H: M8 x 1.25 G H: M5 x 0.8 H: M6 x 1 Model A B C D E F K L Y G ZPR10B 10 13 12 16 25 33.9 50 5.5 15 18.5 27.5 36.4 52.5 5 Model A B C D E F K L Y G ZPR40B 40 50 43 34 47.5 58.3 76.1 24.4 53 38 51.5 62.3 80.1 6 6 8.7 19 13.8 7.5 5.5 ZPR13B 8 32.4 57 48 19 16 ZPR50B 16 18 20 29 37.9 54 9.9 21 8.5 ZPR16B Applicable Tubing Applicable Tubing Applicable tubing O.D.

Compact Cylinder with Air Cushion

mm 4-FD FT Bore size (mm) FX FZ L L1 M L FX FZ B + Stroke A + Stroke 32 34 17 65 38.5 56 40 40 17 72 38.5 62 Rod end male threads 50 50 18 89 43.5 76 Flange material: Carbon steel Rod end nut L1 Rear flange type Rear flange type/RQG, RDQG mm Bore size (mm) Stroke range (mm) A L L1 20 to 100 32 7 28.5 52 20 to 100 40 59 7 28.5 FV M 30 to 100 50 8 33.5 66.5 (All dimensions but A, L and L1

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 0.05 0.05 0.06 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Rotary Actuator/Vane Type

A special end is machined onto both the long and short shafts, and a through-hole is drilled into both s h a f t s. Fe m a l e t h r e a d s a r e machined into the through-holes, whose diameter is equivalent to the diameter of the pilot holes.

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.