SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Vacuum

.1, .r"iF. stde .orri"tg) 9 i!

Vacuum

.1, .r"iF. stde .orri"tg) 9 i!

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Table of Contents

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

Title not found

, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

4-channel Flow Monitor ( compatible)

U8 0x00 3 R/W (0) 0: PFA (PF2A5) 1: PFW (PF2W5) 2: PFd (PF2D5) 3: USEr (User setting) 4 R/W Setting of connection product Y U8 0x01 (1) Setting of connection sensor (For PF3W5) Y U8 0x00 0: FloW 1: tEMP 5 R/W (0) Unit (Selection of display unit, for PF2A5) Y U8 0x00 0: L 1: Ft 6 R/W (0) 7 R/W Unit setting (For PF2W5, PF2D5) Y U8 0x00 0: L 1: GAL (0) Temperature unit setting (For PF2W5) 0:

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Tamper Proof and Flat Head Screw

Port size Type Cylinder side M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Symbol M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Solenoid valve side M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 PF1/8 PF1/4 PF3/8 PF1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Elbow 2 Control type 0 1 Meter-out Meter-in SMC Pneumatics, Inc. 14 Series ASIII1F-T Dimensions

S Couplers

KKA9S-10M -12M -14M KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" Applicable connector: 26 pin

Pressure Gauge Guide

This will cause a malfunction. 8 1 R , 4 1 R G 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R PPA 8 1 R , 4 1 R AL 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R How to Order G 43 01 Option Connection thread size Symbol Specifications Nil X2 X3 Stud parts nickel

Battery-less

1 !2 u r q !7 y Component Parts No.

LEC-OM02704CN

0 1 1 1 1 b6 0 0 1 1 0 0 1 1 b5 0 1 0 1 0 1 0 1 b8 b5 b4 b3 b2 b1 C 0 1 2 3 4 5 6 7 R 0 0 0 0 0 NUL DLE Space 0 P 0 0 0 1 1 SOH DC1 1 A Q 0 0 1 0 2 STX DC2 2 B R 0 0 1 1 3 ETX DC3 3 C S 0 1 0 0 4 4 D T 0 1 0 1 5 5 E U 0 1 1 0 6 6 F V 0 1 1 1 7 7 G W 1 0 0 0 8 ( 2 H 1 0 0 1 9 ) 9 I Y i 1 0 1 0 10 J 1 0 1 1 11 + 1 1 0 0 12 L 1 1 0 1 13 = M m 1 1 1 0 14 N 1

Title not found

Manual override Nil: Nonockins push type 'oltage suppressor wrh ---'l ,hl wth sfige voftageJUepresd B: Lock ng iype (s oned) lD tr]]i\ -r1.LrF-r }pos lDn qhausl cn1er . t_tr-r fll, r-itr'Lt lir. ,L]! gpos ton pressure center ]]-trr\i rt it, rN !fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ?