5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?
(Direct operated)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?
MB (Width across flats) MGPM, MGPL Common dimensions (mm) Bore size (mm) BM (Adjustment bolt) MA MB BM MC MH 12 16 20 25 32 40 50 63 80 100 5 5 6.5 6.5 6.5 9 9 10 15 18 8 10 13 13 19 27 30 36 41 46 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M8 x 1.25 M12 x 1.5 M12 x 1.5 M16 x 1.5 M20 x 1.5 M24 x 1.5 12.5 11.5 16 16 21 30 34 40 46 52 19 19 27 26.5 26.5 33 32.5 37 53.5 57.5 MC MA MH + Adjustment
(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 59 71 82 46 55 66 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 4 5 5 16 16 16 12 15 15 44