SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

VZ100/300/500

M5 x 0.8 b Cv b Cv VV3Z1-01-1 VV4Z1-20-1 1/8 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no.

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U Values inside ( ) are for D-H7LF D-H7C B Approx.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Adsorption Plate

pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

3

4.5 1.5 2 x Port size S U T (35.5) 42 H OUT IN 2 x M3 x 0.5 depth 5 L K N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

AR20-B to AR60-B

-B 3/4, 1 1/8 90 125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95 129.6 46 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount Panel mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

F/ISE

30 20 2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

LFE-OMY0008

Add/dEC P1AH/n2AH P1dH/n1dH (31 ) P1L/n1L P1H/n1H/H1 (30 ) P_1/n_1/H_1 (30 ) 4. 4. 4. 4. SoG/SoR/REd/GRN(33 ) 5. 5. 5. 5. [F 1] OUT1 28 No.LFE*-OMY0008 1. 1. 1. 1. [F 1] [oUt1] 30 () 2. 2. 2. 2. (ON-OFF ) 29 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_1]) (33 ) b.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Coolant Valve

) Nil B Note) Note) Only valve sizes 1, 2, 3 and 4.

MLU

Please contact SMC for more information. 9-13-6 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9-13-7 7 Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order B 25 30 D F MLU Without auto switch With auto switch B 25 30 D F J79W S MDLU Number of auto switches

SFOD-OMT0005CN

20m * Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (2) 1 2 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

NCA1

Female Rod End B .