Basic Type/Direct Mount Type

Bore size 6, 10, 15 Symbol Type M thread Rc NPT G 15 15 mm 20 Nil 20 mm 20, 25, 32, 40 25 25 mm TN TF 50, 63 Switch rail 32 32 mm Nil 40 With switch rail 40 mm N 50 Without switch rail 50 mm Note 1) A type with switch rail has built-in auto switch magnets. Note 2) 15 has built-in auto switch magnets even without switch rail.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [

LEF-OM002xx

to 760 10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

Digital Flow Switch

4 x 2.6 Depth 7 or less (7.7) 30 20 Power supply/Output connector Bracket A (Part no.: ZS-46-A1) 30 25 20 20 20 45 30 2 30 34.6 19 5.2 5.2 5.2 14.7 47 9.6 Bracket configuration allows for mounting in four orientations.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

ZP3

46 6 6 109.5 Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating 56 10 10 1.5, 2, 3.5 114.5 59 15 15 4, 6, 8 10, 13, 16 66.5 20 20 124.5 25 25 Wide selection of piping For 2 piping!

Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Single Axis Electric Actuator Series LJ1S Series LJ1S Slider Guide Lead screw lead mm Mounting Page Model Series Guide type Motor type orientation Slide screw 20 20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard 90 motor 92 Slider guide LJ1S Horizontal 94 Standard 96 motor 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR

High Power Cylinder:

Material 20 25 32 40 Piston seal NLP-20A NLP-19A NLP-32A NLP-40A NBR !