Fluoropolymer Piping Equipment

100% LVP Hydrochloric acid 38% LVW Hydrofluoric acid 50% LQ1 LQ1 Hydrogen peroxide 60% LQ3 LQ3 Methanol 100% LVN LVN Methyl ethyl Ketone Note 2) Nitric acid 70% LQHB LQHB Note 2) Phosphoric acid 86% TL TIL Caustic potash 85% TLM TILM Sulfuric acid 100% Note 2) TD TID Toluene Note 1,2) TH TIH Xylene Note 2) Sodium hydroxide (caustic soda) 100% Note 2) 1.1.1-Trichloroethane

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 100 kPa 100 kPa IO-Link compatible/ L type 0 0 0 0 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift

MHZ2/MHZJ2

. 0.102kgf 1MPa : approx. 10.2kgf/cm Pressure 0.7MPa 50 0.6MPa 0.6MPa External gripping Gripping force N Gripping force N 40 30 0.5MPa 0.5MPa MHZ2/Standard 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 0.25MPa 0.25MPa 0 10 20 30 40 50 60 0 10 20 30 40 50 60 L Gripping point L mm Gripping point L mm MHZJ2/With dust cover MHZ 2-20S MHZ 2-20C 50 100 Pressure 0.7MPa Pressure 0.7MPa 40 80 0.6MPa

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

CXS32-40-XB19 40 152 122 CXS32-45-XB19 45 157 127 CXS32-50-XB19 50 162 132 CXS32-60-XB19 60 172 142 CXS32-70-XB19 70 182 152 CXS32-75-XB19 75 187 157 70 CXS32-80-XB19 80 192 162 CXS32-90-XB19 90 202 172 CXS32-100-XB19 100 212 182 7

Rotary Gripper Series MRHQ

0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa 60 100 Pressure 0.7MPa 0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L

Compact Manifold Regulator

0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min

ITV

0 25 50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

PA3000/5000/PAX1000

The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

CL

Additional weight with air cushion 0.01 0.01 0.02 0.02 Additional weight for long stroke 0.01 0.01 0.02 0.03 No. of auto switches mounted Auto switch model Calculation: (Example) CLG1LA20-100 (Foot, 20, 100 st) Basic weight Additional weight Air cylinder stroke Additional weight of air cushion 0.72 + 0.05 x 100/50 + 0.01 = 0.83 kg 1 2 D-B5/B64 D-C7/C80 D-H7 D-G5/K5 0.72 0.05/50 st 100

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5010050505010050 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84

MRHQ

0.7MPa Pressure 0.7MPa 60 100 0.6MPa 50 0.6MPa 80 Gripping force N Gripping force N 0.5MPa 0.4MPa 0.5MPa 40 60 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25D MRHQ25D L: Gripping point distance 160 100 Pressure 0.7MPa Pressure 0.7MPa 140 Model Selection Guidelines by Workpiece Weight 0.6MPa 0.6MPa 80 120 Gripping

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: Z (5m)

Bore Size: 12mm, Opening & Closing Stroke: 1 (Middle Stroke), Body Option: R (Side Ported Type), Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: Z (5m)