XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

Modular F.R.L. Units

100 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)]

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

Table of Contents

The maximum speed will be 141 mm/s. 50 32 25 20 10 5 16 Load weight (kg) (2.5) 10 6 [Double acting (D), Single acting, Spring return (S)] 6 [Single acting, Spring extend (T)] 1 0.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 0.05 0.01 50 100 300 200 (141)

Compact Cylinder

Auto switches are shipped together, (but not assembled). 2 JCQ Series Specifications Bore size [mm] 12 16 20 25 32 40 50 63 80 100 Action Double acting, Single rod Fluid Air Proof pressure 1.0 MPa Maximum operating pressure 0.7 MPa 1 Minimum operating pressure 0.07 MPa 0.05 MPa Ambient and fluid temperature 5 to 60C Lubrication Not required (Non-lube) Piston speed 50 to 500 mm/s 1 50 to 300

Compact Guide Cylinder

5 to 60C Piston speed Note) 50 to 300 mm/s1 50 to 250 mm/s1 Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) Stroke length tolerance +1.5 0 mm Note) Maximum speed with no load Depending on the system configuration selected, the specified speed may not be satisfied. 1 Maximum operating pressure and piston speed are different from the current product (MGP series).

76

Hz) 200 V (50/60 Hz) IDF-TR9000-8 IDF125FS IDF150FS 9 kVA 15.7 (400) 25.6 (650) 17.7 (450) 11.8 (300) 13.8 (350) 0.51 (13) 1.57 (40) 240 lb (109 kg) [Piping adapter] [Foundation bolt set] IDF-AP607 Specications Part no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 w i !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 q y r !

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

VP3145/3165/3185

Coil rated voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 1 2 3 Electrical entry 110 to 120 VAC, 50/60 Hz T E H G Grommet (Lead wire: 300 mm) Grommet (Lead wire: 600 mm) 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC Grommet terminal Conduit terminal D With connector DO Without connector L With lead wire LN Without lead wire LO Without connector M With lead wire MN Without lead wire 7 240 VAC, 50/60

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.