SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places

MHF2

External gripping Internal gripping L L F F MHF2-8D MHF2-12D 70 Pressure 0.7MPa 30 60 Pressure 0.7MPa 0.6MPa 0.6MPa 50 Gripping force N Gripping force N 0.5MPa 20 0.5MPa 40 0.4MPa 0.4MPa 30 0.3MPa 0.3MPa 10 20 0.2MPa 0.2MPa 10 40 20 40 30 20 10 0 0 80 60 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 150 Gripping

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

VP300/500/700

S070 Nil Standard (Internal pilot) R External pilot Manual override VQ Option Light/Surge voltage suppressor Nil Push type Rated voltage B Locking type (Slotted) Nil None VKF 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz C Locking type (Manual) With light/surge voltage suppressor (Type E, T, D, or Y only) Z Option VQZ 110 to 120 VAC, 50/60 Hz S With surge voltage suppressor (Type G only) 4

5 Port Air Operated Valve Series SYA3000/5000/7000 1

/5 Port Air Operated Valve Flow Characteristics/Weight Flow characteristics Note 2) Note 3) Weight (g) Pilot port size Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2 position 110 Double Closed SA 1.8 0.45 0.35 0.49 2.0 0.37 center 1/8 SYJA720-01 0.35 0.73 3.0 Exhaust VA 1.2 120

4/5 Port Air Operated Valve Series SYJA3000 1

/5 Port Air Operated Valve Flow Characteristics/Weight Flow characteristics Note 2) Note 3) Weight (g) Pilot port size Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2 position 110 Double Closed SA 1.8 0.45 0.35 0.49 2.0 0.37 center 1/8 SYJA720-01 0.35 0.73 3.0 Exhaust VA 1.2 120

VFN2000N

characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF) NPTF Nil F N Voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120

VQC

Example) When SDTD type is used VQZ Valve: VQC1100NY 5 (low wattage type of 0.5 W) 4 pcs. 0.5 [W] 24 [V] 4 [pcs.] = 84 [mA] (4 outputs simultaneously ON) VQD The maximum possible supply current of SDTD is 120 mA.

Dedicated Controller Series LC1 Uniaxial Type

Note 2) The power supply for model LC1-1B3H2 is 200VAC, 50/60Hz. 52 Dedicated Controller Series LC1 Performance/Specifications General specifications Model LC1-1B1 LC1-1B2 Item 100V/110VAC10% 50/60Hz 200V/220VAC10% 50/60Hz (LC1-1B3H2 is 200VAC10%) Power supply 5mA or less Leakage current 80 x 120 x 244mm Dimensions 2.2kg Weight Single unit installation type (resin housing) Housing type Actuator

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Guide Table Series MGF

through K 40 3.5 100 120 114 8.7 6-K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places

5 Port Solenoid Valve SY Series

-M(-F2) 3 4 5 SY5 20-D(-F2) 3 4 5 SY5 20-W0(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 157.8 Max. 10 53.4 12.7 28.1 [35.1] 42.1 27 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 63.5 [65.7] 53.7 [55.9] 73.5 72.6 62.6 55.2 67.8 48.7 45.3 32.7 139.6 [144] 120

Precision Clean Regulator Series SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

Precision Clean Regulator

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to