VFN2000N

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other Manual override/Classification 1 2 3 4 5 6 7 9 Electrical entry Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Grommet Grommet terminal Conduit terminal DIN terminal G E T D Light/Surge voltage suppressor None Nil DIN terminal (Without

I/O Configurator (NFC version)

Registration of dummy Remote 75 6. Wireless system configuration example 76 6.1. Flow chart for using the wireless system (Refer to Step 2) 76 6.2. System Construction Example 77 6.3.

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

Slide Tables MX Series

60 75 100 125 150 175 200 225 250 275 300 Standard Stroke (mm) Bore Size (mm) 6 8 10 12 16 20 25 MXH MXS MXQ MXF MXW MXP Dual Rods For Twice The Force The MXS, MXQ, and MXW use a twin bore design to double the actuation force while maintaining the single bore height.

Clean Room Regulator/Fluoro Resin Type Series SRF30

52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable

Available in 50 and 63 bore sizes. Complies with NAAMS standard (CKZ3N); 9 opening angles: 15, 30, 45, 60, 75, 90, 105, 120, 135; 75 types of arm variations (CKZ3N); Metal cover and metal switch cassette options available; Optional manual handle operator (X2568) available

Available in 50 and 63 bore sizes. Complies with NAAMS standard (CKZ3N); 9 opening angles: 15, 30, 45, 60, 75, 90, 105, 120, 135; 75 types of arm variations (CKZ3N); Metal cover and metal switch cassette options available; Optional manual handle operator (X2568) available

AP500

(70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

PSE550/300

tubing) Resin pipe: Nylon, Piston area of sensor: Silicon Environmental resistance Vibration resistance Impact resistance Temperature characteristics Port size Material of wetted parts Sensor cable With sensor cable Without sensor cable 3-wire oval cable (0.15 mm2) 2-wire oval cable (0.15 mm2) 75 g 35 g Weight Note) Can detect differential pressure from 0 to 2 kPa within the range of 50

VQ

/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

IDX-OM-Y002

50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ion state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron(mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ion (mg/L) Should not be Should not be Should not be inspected

NAMUR

/60 Hz 32 VAC, 50/60 Hz 42 VAC, 50/60 Hz 230 VAC, 50/60 Hz 100 VDC 6 VDC 48 VDC 110 VDC Other voltages 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 48 VAC, 50/60 Hz 12 VAC, 50/60 Hz 24 VAC, 50/60 Hz Electrical entry Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Grommet Grommet

Title not found

l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

Multistage Ejector Series ZL112/212 1

50 75 40 40 ZH 100 50 30 30 20 20 50 ZU 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZL Supply pressure (MPa) Supply pressure (MPa) ZY Flow Characteristics Flow Characteristics Supply pressure: 0.4

The RQ series new air cushion construction allows this series to retain the merits of a compact cylinder. The unique air cushion construction eliminates the cushion ring used in conventional type air cushions, which reduces the overall length of the cylinder. The RQ series meets the demands for reduced shock, noise reduction and improved repeatability at the stroke end. Unique air cushion